MEMS-Enabled miniaturized particulate matter monitor employing 1.6 GHz aluminum nitride thin-film bulk acoustic wave resonator (FBAR) and thermophoretic precipitator

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 476-479

  Black, Justin P ^a   Elium, Alex ^a   White, Richard M ^a   Apte, Michael G ^b   Gundel, Lara A ^b   Cambie, Rossana ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Aerosol; CMOS pierce oscillator; Particulate matter mass sensor; Thermophoresis; Thin film bulk acoustic wave resonator (FBAR)

Indexed keywords

ACOUSTIC EQUIPMENT; ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVES; ALUMINA; ALUMINUM COMPOUNDS; COMPOSITE MICROMECHANICS; ELASTIC WAVES; ENVIRONMENTAL CHAMBERS; LIGHT METALS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NITRIDES; OPTICAL RESONATORS; RESONATORS; THIN FILM DEVICES; TIME MEASUREMENT; ULTRASONICS; WAVE FILTERS;

ADDED MASSES; AEROSOL; AEROSOL INSTRUMENTS; ALUMINUM NITRIDE; CMOS PIERCE OSCILLATOR; FIELD STUDIES; FILM BULK ACOUSTIC WAVE RESONATOR; PARTICULATE MATTER; PARTICULATE MATTER MASS SENSOR; PIERCE OSCILLATOR; REAL-TIME MEASUREMENTS; RESONANT FREQUENCY SHIFTS; THERMOPHORESIS; THIN-FILM BULK ACOUSTIC WAVE RESONATOR (FBAR);

ACOUSTICS;

EID: 48149109986     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.128     Document Type: Conference Paper

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