Enhanced airborne nanoparticles mass sensing using a high-mode resonant silicon cantilever sensor

Proceedings of IEEE Sensors

Volumn , Issue , 2011, Pages 736-739

  Wasisto, H S ^a   Merzsch, S ^a   Waag, A ^a   Kirsch, I ^b   Uhde, E ^b   Salthammer, T ^b   Peiner, E ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AIRBORNE NANOPARTICLES; CANTILEVER SENSORS; FUNDAMENTAL MODES; MASS SENSING; PIEZO-RESISTIVE; QUALITY FACTORS; RESONANT MODE; SENSOR SENSITIVITY; SILICON CANTILEVER;

NANOCANTILEVERS; NATURAL FREQUENCIES;

SENSORS;

EID: 84856869936     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2011.6127053     Document Type: Conference Paper

References (9)

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