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Journal of Applied Physics

Volumn 110, Issue 9, 2011, Pages

Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orientations

(6) Qin, Lifeng a Chen, Qingming b Cheng, Hongbin a Chen, Qian a Li, Jing Feng c Wang, Qing Ming a

a University of Pittsburgh (United States)

b KUNMING UNIVERSITY OF SCIENCE AND TECHNOLOGY (China)

c TSINGHUA UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN RESONATORS; ALN THIN FILMS; ANALYSIS OF LIQUIDS; C-AXIS ORIENTATIONS; DESIGN AND APPLICATION; ELECTRODE AREAS; FILM BULK ACOUSTIC-WAVE RESONATORS; LIQUID LOADING; LIQUID MEDIUM; LIQUID VISCOSITY; LONGITUDINAL MODES; MAXIMUM PHASE; MECHANICAL QUALITY FACTORS; OLIVE OIL; OSCILLATOR CIRCUITS; RESONANT FREQUENCY SHIFT; SENSOR MEASUREMENTS; SHEAR MODE RESONATORS; SHEAR MODES; THICKNESS SHEAR MODES; TILT ANGLE; VISCOSITY SENSOR; VISCOUS LIQUIDS; ZNO;

ACETONE; ACOUSTIC IMPEDANCE; ACOUSTIC WAVES; ACOUSTICS; CONSTITUTIVE EQUATIONS; LIQUIDS; LOADING; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); SENSORS; SHEAR FLOW; THIN FILMS; VEGETABLE OILS; VISCOSITY OF LIQUIDS; WAVE FILTERS; ZINC OXIDE;

ACOUSTIC RESONATORS;

EID: 81355142774 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3657781 Document Type: Article

Times cited : (50)

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