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Journal of Materials Science: Materials in Electronics

Volumn 23, Issue 7, 2012, Pages 1352-1360

The characteristics of transparent conducting Al-doped zinc oxide thin films deposited on polymer substrates

(4) Kao, J Y a Hsu, C Y a Chen, G C a Wen, D C b

a LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY (Taiwan)

b CHINA UNIVERSITY OF SCIENCE AND TECHNOLOGY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AL-DOPED ZINC OXIDE; AZO FILMS; AZO THIN FILMS; CERAMIC TARGET; DEPOSITION PROCESS; DEPOSITION TIME; ELECTRICAL RESISTIVITY; EXPERIMENTAL DATA; GREY RELATIONAL ANALYSIS; ORTHOGONAL ARRAY; PERFORMANCE CHARACTERISTICS; POLYMER SUBSTRATE; PROCESS PARAMETERS; QUALITY DESIGN; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-POWER; SUBSTRATE TEMPERATURE; TAGUCHI;

ALUMINUM; DEPOSITION; ELECTRIC CONDUCTIVITY; INFORMATION THEORY; MAGNETRON SPUTTERING; OPTICAL FILMS; OPTICAL PROPERTIES; POLYETHYLENE TEREPHTHALATES; TAGUCHI METHODS; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

SUBSTRATES;

EID: 84863984842 PISSN: 09574522 EISSN: 1573482X Source Type: Journal
DOI: 10.1007/s10854-011-0598-0 Document Type: Article

Times cited : (14)

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