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Nanotechnology

Volumn 23, Issue 31, 2012, Pages

Ultrahigh-frequency surface acoustic wave transducers on ZnO/SiO 2/Si using nanoimprint lithography

(6) Buyukkose S a Vratzov, B b Atac D a Van Der Veen, J a Santos, P V c Van Der Wiel, W G a

a UNIVERSITY OF TWENTE (Netherlands)

b NT and D Nanotechnology and Devices (Germany)

c PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSION CONTROL; EXPERIMENTAL DATA; FINGER ELECTRODE; HYDROGEN SILSESQUIOXANE; INTERDIGITAL TRANSDUCER; PLANARIZATION; RAYLEIGH MODE; SURFACE ACOUSTIC WAVES; ULTRA-HIGH-FREQUENCY; ZNO;

ELECTRON BEAM LITHOGRAPHY; NANOIMPRINT LITHOGRAPHY; SILICON; TRANSDUCERS; ULTRASONIC TRANSDUCERS; ZINC OXIDE;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 84863915638 PISSN: 09574484 EISSN: 13616528 Source Type: Journal
DOI: 10.1088/0957-4484/23/31/315303 Document Type: Article

Times cited : (41)

References (32)

1
- 67650509656
- 10.1016/S0041-624X(97)00146-7 0041-624X
- Michael J V 1998 Ultrasonics 36 7
- (1998) Ultrasonics , vol.36 , pp. 7
- Michael, J.V.¹

2
- 3543089411
- 10.1103/PhysRevLett.78.4099 0031-9007
- Rocke C, Zimmermann S, Wixforth A and Kotthaus J P 1997 Phys. Rev. Lett. 78 4099
- (1997) Phys. Rev. Lett. , vol.78 , pp. 4099
- Rocke, C.¹ Zimmermann, S.² Wixforth, A.³ Kotthaus, J.P.⁴

3
- 22144447526
- Modulation of photonic structures by surface acoustic waves
- DOI 10.1088/0034-4885/68/7/R02, PII S0034488505721965
- Lima M M D Jr and Santos V P 2005 Rep. Prog. Phys. 68 1639 (Pubitemid 40976629)
- (2005) Reports on Progress in Physics , vol.68 , Issue.7 , pp. 1639-1701
- De Lima Jr., M.M.¹ Santos, P.V.²

4
- 0032093560
- 10.1016/S0921-4526(98)00086-6 0921-4526 B
- Talyanskii V I, Shilton J M, Cunningham J, Pepper M, Ford C J B, Smith C G, Linfield E H, Ritchie D A and Jones G A C 1998 Physica B 249-251 140
- (1998) Physica , vol.249-251 , pp. 140
- Talyanskii, V.I.¹ Shilton, J.M.² Cunningham, J.³ Pepper, M.⁴ Ford, C.J.B.⁵ Smith, C.G.⁶ Linfield, E.H.⁷ Ritchie, D.A.⁸ Jones, G.A.C.⁹

5
- 84863943921
- 10.1103/PhysRevLett.87.276601 0031-9007 276601
- Sogawa T, Santos P V, Zhang S K, Eshlaghi S, Wieck A D and Ploog K H 2001 Phys. Rev. Lett. 87 276601
- (2001) Phys. Rev. Lett. , vol.87
- Sogawa, T.¹ Santos, P.V.² Zhang, S.K.³ Eshlaghi, S.⁴ Wieck, A.D.⁵ Ploog, K.H.⁶

6
- 0024752584
- Applications of surface acoustic and shallow bulk acoustic wave devices
- DOI 10.1109/5.40664
- Campbell C K 1989 Proc. IEEE 77 1453 (Pubitemid 20641734)
- (1989) Proceedings of the IEEE , vol.77 , Issue.10 , pp. 1453-1484
- Campbell Colin, K.¹

7
- 84863965510
- 10.1103/PhysRevB.66.155439 0163-1829 B 155439
- Takagaki Y, Santos P V, Wiebicke E, Brandt O, Schönherr H-P and Ploog K H 2002 Phys. Rev. B 66 155439
- (2002) Phys. Rev. , vol.66
- Takagaki, Y.¹ Santos, P.V.² Wiebicke, E.³ Brandt, O.⁴ Schönherr, H.-P.⁵ Ploog, K.H.⁶

8
- 79955990036
- Superhigh-frequency surface-acoustic-wave transducers using AiN layers grown on SiC substrates
- DOI 10.1063/1.1509471
- Takagaki Y, Santos P V, Wiebicke E, Brandt O, Schönherr H-P and Ploog K H 2002 Appl. Phys. Lett. 81 2538 (Pubitemid 35312731)
- (2002) Applied Physics Letters , vol.81 , Issue.14 , pp. 2538
- Takagaki, Y.¹ Santos, P.V.² Wiebicke, E.³ Brandt, O.⁴ Schonherr, H.-P.⁵ Ploog, K.H.⁶

9
- 9744235810
- 10.1063/1.1785842 0021-8979
- Wu T-T and Wang W-S 2004 J. Appl. Phys. 96 5249
- (2004) J. Appl. Phys. , vol.96 , pp. 5249
- Wu, T.-T.¹ Wang, W.-S.²

10
- 0028259961
- 10.1143/JJAP.33.324 0021-4922
- Nakahata H, Higaki K, Hachigo A, Shikata S, Fujimori N, Takahashi Y, Kajihara T and Yamamoto Y 1994 Japan. J. Appl. Phys. 33 324
- (1994) Japan. J. Appl. Phys. , vol.33 , Issue.PART 1 , pp. 324
- Nakahata, H.¹ Higaki, K.² Hachigo, A.³ Shikata, S.⁴ Fujimori, N.⁵ Takahashi, Y.⁶ Kajihara, T.⁷ Yamamoto, Y.⁸

11
- 0024092572
- 10.1088/0022-3727/21/10/013 0022-3727
- Srivastava R and Mansingh A 1988 J. Phys. D: Appl. Phys. 21 1535
- (1988) J. Phys. D: Appl. Phys. , vol.21 , pp. 1535
- Srivastava, R.¹ Mansingh, A.²

12
- 0027695797
- 10.1109/58.248206 0885-3010
- Shih W-C, Wu M-S, Shimizu M and Shiosaki T 1993 IEEE Trans. Ultrason., Ferroelectr. Freq. Control. 40 642
- (1993) IEEE Trans. Ultrason., Ferroelectr. Freq. Control. , vol.40 , pp. 642
- Shih, W.-C.¹ Wu, M.-S.² Shimizu, M.³ Shiosaki, T.⁴

13
- 0037342705
- Nakahata H, Fujii S, Higaki K, Hachigo A, Kitabayashi H, Shikata S and Fujimori N 2003 Semicond. Sci. Technol. 18 96
- (2003) Semicond. Sci. Technol. , vol.18 , pp. 96
- Nakahata, H.¹ Fujii, S.² Higaki, K.³ Hachigo, A.⁴ Kitabayashi, H.⁵ Shikata, S.⁶ Fujimori, N.⁷

14
- 78649398376
- 10.1109/LED.2010.2078484 0741-3106
- Muller A, Neculoiu D, Konstantinidis G, Deligeorgis G, Dinescu A, Stavrinidis A, Cismaru A, Dragoman M and Stefanescu A 2010 IEEE Electron. Device Lett. 31 1398
- (2010) IEEE Electron. Device Lett. , vol.31 , pp. 1398
- Muller, A.¹ Neculoiu, D.² Konstantinidis, G.³ Deligeorgis, G.⁴ Dinescu, A.⁵ Stavrinidis, A.⁶ Cismaru, A.⁷ Dragoman, M.⁸ Stefanescu, A.⁹

15
- 84855836253
- 10.1016/j.jmatprotec.2011.08.007 0924-0136
- Iriarte G F, Rodriguez-Madrid J G and Calle F 2012 J. Mater. Process. Technol. 212 707
- (2012) J. Mater. Process. Technol. , vol.212 , pp. 707
- Iriarte, G.F.¹ Rodriguez-Madrid, J.G.² Calle, F.³

16
- 0036472248
- 3 using imprint lithography
- DOI 10.1088/0957-4484/13/1/303, PII S0957448402268427
- Takagaki Y, Wiebicke E, Kostial H and Ploog K H 2002 Nanotechnology 13 15 (Pubitemid 34180673)
- (2002) Nanotechnology , vol.13 , Issue.1 , pp. 15-17
- Takagaki, Y.¹ Wiebicke, E.² Kostial, H.³ Ploog, K.H.⁴

17
- 19944431713
- Fabrication of a surface acoustic wave-based correlator using step-and-flash imprint lithography
- DOI 10.1116/1.1821508
- Cardinale G F, Skinner J L, Talin A A, Brocato R W, Palmer D W, Mancini D P, Dauksher W J, Gehoski K, Le N, Nordquist K J and Resnick D J 2004 J. Vac. Sci. Technol. B 22 3265 (Pubitemid 40185111)
- (2004) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.22 , Issue.6 , pp. 3265-3270
- Cardinale, G.F.¹ Skinner, J.L.² Talin, A.A.³ Brocato, R.W.⁴ Palmer, D.W.⁵ Mancini, D.P.⁶ Dauksher, W.J.⁷ Gehoski, K.⁸ Le, N.⁹ Nordquist, K.J.¹⁰ Resnick, D.J.¹¹

18
- 24644488692
- Development of an etch-definable lift-off process for use with Step and Flash Imprint Lithography
- DOI 10.1117/12.605932, 22, Emerging Lithographic Technologies IX
- Le N V, Gehoski K A, Dauksher W J, Baker J H, Resnick D J and Dues L 2005 Proc. SPIE 5751 219 (Pubitemid 41275390)
- (2005) Progress in Biomedical Optics and Imaging - Proceedings of SPIE , vol.5751 , Issue.I , pp. 219-226
- Le, N.V.¹ Gehoski, K.A.² Dauksher, W.J.³ Baker, J.H.⁴ Resnick, D.J.⁵ Dues, L.⁶

19
- 79953654233
- 0960-1317
- Chen N H, Huang J C, Wang C Y and Huang F S 2011 J. Micromech. Microeng. 21 45021
- (2011) J. Micromech. Microeng. , vol.21 , pp. 45021
- Chen, N.H.¹ Huang, J.C.² Wang, C.Y.³ Huang, F.S.⁴

20
- 79953782230
- 10.1116/1.3562939 1071-1023 B 021602
- Büyükköse S, Vratzov B and van der Wiel W G 2011 J. Vac. Sci. Technol. B 29 021602
- (2011) J. Vac. Sci. Technol. , vol.29
- Büyükköse, S.¹ Vratzov, B.² Van Der Wiel, W.G.³

21
- 25144462707
- A comprehensive review of ZnO materials and devices
- DOI 10.1063/1.1992666, 041301
- Özgür Ü, Alivov Ya I, Liu C, Teke A, Reshchikov M A, Doan S, Avrutin V, Cho S-J and Morko̧ H 2005 J. Appl. Phys. 98 41301 (Pubitemid 41348664)
- (2005) Journal of Applied Physics , vol.98 , Issue.4 , pp. 1-103
- Ozgur, U.¹ Alivov, Ya.I.² Liu, C.³ Teke, A.⁴ Reshchikov, M.A.⁵ Dogan, S.⁶ Avrutin, V.⁷ Cho, S.-J.⁸ Morko, H.⁹

22
- 0027593101
- 10.1016/0022-0248(93)90861-P 0022-0248
- Fujimura N, Nishihara T, Goto S, Xu J and Ito T 1992 J. Cryst. Growth 130 269
- (1992) J. Cryst. Growth , vol.130 , pp. 269
- Fujimura, N.¹ Nishihara, T.² Goto, S.³ Xu, J.⁴ Ito, T.⁵

23
- 0022114946
- 10.1109/T-SU.1985.31645 0018-9537
- Hickernell F S 1985 IEEE Trans. Sonics Ultrason. 32 621
- (1985) IEEE Trans. Sonics Ultrason. , vol.32 , pp. 621
- Hickernell, F.S.¹

24
- 0037445192
- 10.1016/S0921-5107(02)00754-7 0921-5107 B
- Kim K S, Kim H W and Lee C M 2003 Mater. Sci. Eng. B 98 135
- (2003) Mater. Sci. Eng. , vol.98 , pp. 135
- Kim, K.S.¹ Kim, H.W.² Lee, C.M.³

25
- 34547257967
- Growth and characterization of high resistivity c-axis oriented ZnO films on different substrates by RF magnetron sputtering for MEMS applications
- DOI 10.1007/s10853-006-0372-5
- Singh R, Kumar M and Chandra S 2007 J. Mater. Sci. 42 4675 (Pubitemid 47142228)
- (2007) Journal of Materials Science , vol.42 , Issue.12 , pp. 4675-4683
- Singh, R.¹ Kumar, M.² Chandra, S.³

26
- 0032071636
- 10.1109/22.668686 0018-9480
- Heinrich W, Gerdes J, Schmuckle F J, Rheinfelder C and Strohm K 1998 IEEE Trans. Microw. Theory Technol. 46 709
- (1998) IEEE Trans. Microw. Theory Technol. , vol.46 , pp. 709
- Heinrich, W.¹ Gerdes, J.² Schmuckle, F.J.³ Rheinfelder, C.⁴ Strohm, K.⁵

27
- 1642617295
- 10.1016/j.ultras.2004.01.034 0041-624X
- Clement M, Vergara L, Sangrador J, Iborra E and Sanz-Hervas A 2004 Ultrasonics 42 403
- (2004) Ultrasonics , vol.42 , pp. 403
- Clement, M.¹ Vergara, L.² Sangrador, J.³ Iborra, E.⁴ Sanz-Hervas, A.⁵

28
- 84863911422
- Slobodnik A J, Conway E D and Delmonico R T 1973 Microwave Acoustics Handbook (Bulk Wave Velocities) vol 3 (Spring field, VA: National Technical Information Service, US Department of Commerce)
- (1973) Microwave Acoustics Handbook , vol.3
- Slobodnik, A.J.¹ Conway, E.D.² Delmonico, R.T.³

29
- 36849061606
- 10.1016/j.crhy.2007.08.001 1631-0705
- Hadjoub Z, Beldi I and Doghmane A 2007 C. R. Physique 8 948
- (2007) C. R. Physique , vol.8 , pp. 948
- Hadjoub, Z.¹ Beldi, I.² Doghmane, A.³

30
- 84863920691
- IEEE Standard on Piezoelectricity-Std 1988 (New York: The Institute of Electrical and Electronics Engineers, Inc) 176-1987
- IEEE Standard on Piezoelectricity-Std 1988

31
- 84953649327
- 10.1121/1.1909399 0001-4966
- Papadakis E P 1965 J. Acoust. Soc. Am. 37 703
- (1965) J. Acoust. Soc. Am. , vol.37 , pp. 703
- Papadakis, E.P.¹

32
- 68849109409
- 10.1016/j.sna.2009.07.014 0924-4247 A
- Zhao Y G, Liu M, Li D M, Li J J and Niu J B 2009 Sensors Actuators A 154 30
- (2009) Sensors Actuators , vol.154 , pp. 30
- Zhao, Y.G.¹ Liu, M.² Li, D.M.³ Li, J.J.⁴ Niu, J.B.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.