SAW characteristics of AlN films sputtered on silicon substrates

Ultrasonics

Volumn 42, Issue 1-9, 2004, Pages 403-407

  Clement, M ^a   Vergara, L ^a   Sangrador, J ^a   Iborra, E ^a   Sanz Hervas A ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

AlN; Electromagnetic feedthrough; SAW; Si substrate; Sputtering

Indexed keywords

ACOUSTIC WAVES; PIEZOELECTRIC TRANSDUCERS; RESONANCE; SILICON; SPUTTERING; SURFACE WAVES; THIN FILMS; TRANSDUCERS;

SILICON SUBSTRATES; SURFACE ACOUSTIC WAVES (SAW);

ALUMINUM NITRIDE;

EID: 1642617295     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2004.01.034     Document Type: Conference Paper

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