FEM modeling of SAW organic vapor sensors

Sensors and Actuators, A: Physical

Volumn 154, Issue 1, 2009, Pages 30-34

  Zhao, Yi Gui ^a   Liu, Ming ^a   Li, Dong Mei ^a   Li, Jing Jing ^a   Niu, Jie Bin ^a  

^a INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

FEM modeling; Organic vapor; Polymer; SAW Sensor

Indexed keywords

EXPERIMENTAL VALUES; FEM MODELING; FINITE ELEMENT METHOD SIMULATION; FREQUENCY SHIFT; ORGANIC VAPOR; ORGANIC VAPOR SENSORS; POLYMER COATING; PROPAGATION CHARACTERISTICS; SAW SENSOR; SURFACE ACOUSTIC WAVES; VAPOR CONCENTRATIONS; VAPOR SENSORS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; FINITE ELEMENT METHOD; PLASTIC COATINGS; POLYMERS; SENSORS;

VAPORS;

EID: 68849109409     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.07.014     Document Type: Article

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