Coplanar passive elements on si substrate for frequencies up to 110 GHz

IEEE Transactions on Microwave Theory and Techniques

Volumn 46, Issue 5 PART 2, 1998, Pages 709-712

  Heinrich, W ^a   Gerdes, J ^a   Schmuckle F J ^a   Rheinfelder, C ^b   Strohm, K ^b  

^a LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

^b Arcor AG & Co KG   (Germany)

Author keywords

Branchline coupler; Coplanar element library; Coplanar elements; Silicon substrate; Spiral inductor; T junction

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC INDUCTORS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SEMICONDUCTING SILICON; SEMICONDUCTOR JUNCTIONS; SUBSTRATES;

BRANCHLINE COUPLERS; SPIRAL INDUCTORS;

WAVEGUIDE COUPLERS;

EID: 0032071636     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.668686     Document Type: Article

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