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Volumn 81, Issue 14, 2002, Pages 2538-2540

Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN FILMS; ALN LAYERS; SIC SUBSTRATES;

ACOUSTIC WAVE VELOCITY; SILICON CARBIDE; SUBSTRATES;

ACOUSTIC TRANSDUCERS;

EID: 79955990036 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1509471 Document Type: Article

Times cited : (87)

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