The relationship between hydrogen and paramagnetic defects in thin film silicon irradiated with 2 MeV electrons

Journal of Physics Condensed Matter

Volumn 24, Issue 30, 2012, Pages

  Astakhov, O ^a,b   Carius, R ^a   Petrusenko, Yu ^b   Borysenko, V ^b   Barankov, D ^b   Finger, F ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b KHARKOV INSTITUTE OF PHYSICS AND TECHNOLOGY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

2-MEV ELECTRON; A-SI:H; CRYSTALLINE SI; ESR SPECTRA; HYDROGEN ATOMS; HYPERFINE INTERACTIONS; HYPERFINES; METASTABILITIES; NUCLEAR MAGNETIC MOMENT; PARAMAGNETIC CENTERS; PARAMAGNETIC DEFECTS; SI DANGLING BONDS; THIN FILM SILICON;

AMORPHOUS MATERIALS; C (PROGRAMMING LANGUAGE); DANGLING BONDS; DEUTERIUM; ELECTRON SPIN RESONANCE SPECTROSCOPY; HYDROGEN; HYDROGENATION; MAGNETIC MOMENTS; PARAMAGNETISM; SILICON;

AMORPHOUS SILICON;

EID: 84863761335     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/24/30/305801     Document Type: Article

References (50)

1. Street R A 1991 Hydrogenated Amorphous Silicon (Cambridge: Cambridge University Press)
2. Staebler D L and Wronski C R 1977 Appl. Phys. Lett. 31 292
3. Lang D V, Cohen J D and Harbison J P 1982 Phys. Rev. Lett. 48 421
4. Shimizu T 2004 Japan. J. Appl. Phys. 43 3257
5. Stutzmann M, Jackson W B and Tsai C C 1985 Phys. Rev. B 32 23
6. Branz H M 2003 Sol. Energy Mater. Sol. Cells 78 425
7. Fehr M, Schnegg A, Rech B, Lips K, Astakhov O, Finger F, Pfanner G, Freysoldt C, Neugebauer J, Bittl R and Teutloff C 2011 Phys. Rev. B 84 245203
8. Pfanner G, Freysoldt Ch, Neugebauer J and Gerstmann U 2012 Phys. Rev. B 85 195202
9. Weil J A and Bolton J R 2007 Electron Paramagnetic Resonance: Elementarytheory and Applications (New Jersey: Wiley) pp 99-105
10. Stein H J 1971 Radiat. Eff. Defect Solids 9 195
11. Watkins G D 2000 Mater. Sci. Semicon. Proc. 3 227 (Pubitemid 32034294)
12. Schweiger A 1993 Appl. Magn. Reson. 5 229-64
13. Mohr P J, Taylor B N and Newell D B 2008 Rev. Mod. Phys. 80 633-730
14. Gorelkinskii Yu V and Nevinnyi N N 1991 Physica B 170 155 (Pubitemid 21664292)
15. Bech Nielsen B, Johannesen P, Stallinga P, Bonde Nielsen K and Byberg J R 1997 Phys. Rev. Lett. 79 1507
16. Johannesen P, Bech Nielsen B and Byberg J R 2000 Phys. Rev. B 61 4659
17. Stallinga P, Gregorkiewicz T, Ammerlaan C A J and Gorelkinskii Yu V 1993 Phys. Rev. Lett. 71 117
18. Miyagawa I and Gordy W 1961 J. Am. Chem. Soc. 83 1036
19. Biegelsen D K and Stutzmann M 1986 Phys. Rev. B 33 3006
20. Stutzmann M and Biegelsen D K 1989 Phys. Rev. B 40 9834
21. Ishii N, Kumeda M and Shimizu T 1982 Japan. J. Appl. Phys. 21 L92
22. Yamasaki S and Isoya J 1993 J. Non-Cryst. Solids 164 169
23. Isoya J, Yamasaki S, Okushi H, Matsuda A and Tanaka K 1993 Phys. Rev. B 47 7013
24. Isoya J, Yamasaki S, Matsuda A A and Tanaka K 1994 Phil. Mag. B 69 263
25. Lim P K, Tam W K, Yeung L F and Lam F M 2007 J. Phys.: Conf. Ser. 61 708
26. Yamasaki S, Kuroda S, Tanaka K and Hayashi S 1984 Solid State Commun. 50 9 (Pubitemid 14609981)
27. Brandt M S, Bayerl M W, Stutzmann M and Graeff C F O 1998 J. Non-Cryst. Solids 227 343
28. Fehr M, Schnegg A, Teutloff C, Bittl R, Astakhov O, Finger F, Rech B and Lips K 2010 Phys. Status Solidi a 207 552
29. Astakhov O, Carius R, Petrusenko Yu, Borysenko V, Barankov D and Finger F 2007 Phys. Status Solidi (RRL) 2 R77 (Pubitemid 351175974)
30. Astakhov O, Finger F, Carius R, Lambertz A, Petrusenko Yu, Borysenko V and Barankov D 2007 Thin Solid Films 515 7513 (Pubitemid 47198748)
31. Astakhov O, Carius R, Lambertz A, Petrusenko Yu, Borysenko V, Barankov D and Finger F 2008 J. Non-Cryst. Solids 354 2329
32. Hikita H, Takeda K, Kimura Y, Yokomichi H and Morigaki K 1997 J. Phys. Soc. Japan 66 1730
33. Takeda K, Hikita H, Kimura Y, Yokomichi H and Morigaki K 1998 Japan. J. Appl. Phys. 37 630
34. Baia Neto A L, Lambertz A, Carius R and Finger F 2002 J. Non-Cryst. Solids 299 274 (Pubitemid 34473262)
35. Dylla T 2005 Electron Spin Resonance and Transient Photocurrent Measurements on Microcrystalline Silicon vol 43 (Jülich: Forschungszentrum Jülich GmbH) Schriften des Forschungszentrums Jülich, Energietechnik
36. Houben L, Luysberg M, Hapke P, Carius R, Finger F and Wagner H 1998 Phil. Mag. A 77 1447
37. Astakhov O, Carius R, Petrusenko Yu, Borysenko V, Barankov D and Finger F 2007 Mater. Res. Soc. Symp. Proc. 989 3
38. Astakhov O, Carius R, Finger F, Petrusenko Yu, Borysenko V and Barankov D 2009 Phys. Rev. B 79 104205
39. Finger F, Carius R, Dylla T, Klein S, Okur S and Günes M 2003 IEE Proc. Circ. Dev. Syst. 150 300
40. Taylor P C, Baugher J F and Kriz H M 1975 Chem. Rev. 75 203
41. Poole C P and Farach H A 1979 Bull. Magn. Reson. 1 162
42. Stoll S and Schweiger A 2006 J. Magn. Reson. 178 42-55 (Pubitemid 41774010)
43. Rodgers J L and Nicewander W A 1988 Am. Stat. 42 59
44. Street R, Biegelsen D and Stuke J 1979 J. Phil. Mag. B 40 451
45. Voget-Grote U, Kümmerle W, Fischer R and Stuke J 1980 Phil. Mag. B 41 127
46. Pontuschka W M, Carlos W W, Taylor P C and Griffith R W 1982 Phys. Rev. B 25 4362
47. Dersch H, Schweitzer L and Stuke J 1983 Phys. Rev. B 28 4678
48. Dersch H, Skumanich A and Amer N M 1985 Phys. Rev. B 31 6913
49. Bronner W, Mehring M and Brüggemann R 2002 Phys. Rev. B 65 165212
50. Vavilov V S and Ukhin N A 1977 Radiation Effects in Semiconductors and Semiconductor Devices; Translated From Russian (New York: Consultants Bureau)