Structure of the ESR spectra of thin film silicon after electron bombardment

Journal of Non-Crystalline Solids

Volumn 354, Issue 19-25, 2008, Pages 2329-2332

  Astakhov, O ^a,b   Carius, R ^a   Lambertz, A ^a   Petrusenko, Yu ^b   Borysenko, V ^b   Barankov, D ^b   Finger, F ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b KHARKOV INSTITUTE OF PHYSICS AND TECHNOLOGY   (Ukraine)

Author keywords

Defects; Silicon

Indexed keywords

ANNEALING; DEFECT STRUCTURES; ELECTRON IRRADIATION; MATHEMATICAL MODELS; PARAMAGNETIC RESONANCE; SILICON;

DANGLING BOND RESONANCE; DEFECT STATES; ELECTRON BOMBARDMENT;

THIN FILMS;

EID: 42649084707     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.10.048     Document Type: Article

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