Novel piezoresistive high-g accelerometer geometry with very high sensitivity-bandwidth product

Sensors and Actuators, A: Physical

Volumn 182, Issue , 2012, Pages 41-48

  Kuells, Robert ^a   Nau, Siegfried ^a   Salk, Manfred ^a   Thoma, Klaus ^a  

^a FRAUNHOFER INSTITUTE FOR HIGH SPEED DYNAMICS   (Germany)

Author keywords

Figure of merit; Frequency sensitivity product; Geometrical constant; High g accelerometer; MEMS; Piezoresistive; Spring mass system

Indexed keywords

FIGURE OF MERITS; FREQUENCY-SENSITIVITY PRODUCT; GEOMETRICAL CONSTANT; HIGH-G ACCELEROMETERS; PIEZO-RESISTIVE; SPRING-MASS SYSTEM;

BANDWIDTH; DESIGN; MEMS; NATURAL FREQUENCIES; SENSORS;

ACCELEROMETERS;

EID: 84863494743     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.05.014     Document Type: Article

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