Coupling high force sensitivity and high stiffness in piezoresistive cantilevers with embedded si-nanowires

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 1065-1068

  Naeli, Kianoush ^a   Brand, Oliver ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); ELECTRIC WIRE; FINITE ELEMENT METHOD; MOLECULAR BEAM EPITAXY; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOWIRES; NONMETALS; OPTICAL DESIGN; SENSORS; SILICON; STIFFNESS; WIRE;

CANTILEVER THICKNESS; CONVENTIONAL APPROACH; EXPERIMENTAL DATA; FINITE ELEMENT SIMULATIONS; FORCE SENSITIVITY; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTIVE; SENSITIVITY INCREASES; SILICON NANOWIRES;

PHOTORESISTS;

EID: 48349131513     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388589     Document Type: Conference Paper

References (9)

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