High-performance monolithic triaxial piezoresistive shock accelerometers

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 339-346

  Dong, Peitao ^a   Li, Xinxin ^a   Yang, Heng ^a   Bao, Haifei ^a   Zhou, Wei ^a   Li, Shengyi ^a   Feng, Songlin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Cross axis sensitivity; High shock measurement; Micromachining; Monolithic integration; Resonant frequency; Sensitivity; Triaxial accelerometer

Indexed keywords

MICROMACHINING; NATURAL FREQUENCIES; SENSITIVITY ANALYSIS; SENSORS; STRESS ANALYSIS;

PIEZORESISTIVE SHOCK ACCELEROMETERS; SENSING ELEMENTS;

ACCELEROMETERS;

EID: 38149120675     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.10.032     Document Type: Article

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