A micromachined piezoresistive accelerometer with high sensitivity: Design and modelling

Microelectronic Engineering

Volumn 49, Issue 3-4, 1999, Pages 263-272

  Lim, M K ^a   Du, H ^a   Su, C ^a   Jin, W L ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Accelerometer; Micro accelerometer; Microsensors; Piezoresistive sensor

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; MICROSENSORS; NATURAL FREQUENCIES; OPTIMIZATION; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS;

MICROMACHINED PIEZORESISTIVE ACCELEROMETERS;

ACCELEROMETERS;

EID: 0033349520     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00447-5     Document Type: Article

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