Calibration and examination of piezoresistive Wheatstone bridge cantilevers for scanning probe microscopy

Ultramicroscopy

Volumn 97, Issue 1-4, 2003, Pages 385-389

  Gotszalk, Teodor ^a   Grabiec, Piotr ^b   Rangelow, Ivo W ^c  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^c UNIVERSITY OF KASSEL   (Germany)

Author keywords

Piezoresistive effect; Piezoresistive sensor; Scanning probe microscopy

Indexed keywords

FREQUENCIES; MICROMACHINING; RESONANCE; SENSITIVITY ANALYSIS;

SCANNING PROBE MICROSCOPY (SPM);

MICROSCOPIC EXAMINATION;

ACCURACY; APPARATUS; ARTICLE; CALIBRATION; EXAMINATION; FORCE; FREQUENCY ANALYSIS; GEOMETRY; LIGHT; MEASUREMENT; PIEZOELECTRICITY; SCANNING PROBE MICROSCOPY; SENSOR; TECHNIQUE;

EID: 0037527922     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(03)00065-2     Document Type: Article

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