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Journal of Applied Physics

Volumn 105, Issue 7, 2009, Pages

Pressure sensor based on magnetic tunnel junctions

(6) Meyners, D a Von Hofe, T a Vieth, M b Ruhrig M b Schmitt, S c Quandt, E a

a UNIVERSITY OF KIEL (Germany)

b SIEMENS AG (Germany)

c INFINEON TECHNOLOGIES AG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FOUR POINTS; GAUGE FACTORS; HIGHLY SENSITIVES; MAGNETIC TUNNEL JUNCTIONS; MECHANICAL STRESS; MICROMACHINED MEMBRANES; PRESSURE GAUGES; REFERENCE LAYERS; TUNNEL BARRIERS;

GAGES; MAGNETIC DEVICES; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SEMICONDUCTOR JUNCTIONS; STRESSES; TUNNELS; WAVEGUIDE JUNCTIONS;

TUNNEL JUNCTIONS;

EID: 65249118974 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3063662 Document Type: Article

Times cited : (44)

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