Tunable behavior of reflectance minima in periodic Ge submicron grating structures

Journal of the Optical Society of America B: Optical Physics

Volumn 29, Issue 3, 2012, Pages 357-362

  Leem, Jung Woo ^a   Kim, Yong Pyung ^a   Yu, Jae Su ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT ANGLE; GERMANIUM; REFLECTION; REFRACTIVE INDEX; SUBSTRATES; SURFACE CHEMISTRY; SURFACE PROPERTIES;

DRY ETCHING PROCESS; EFFECTIVE REFRACTIVE INDEX; GE SUBSTRATES; GRATING STRUCTURES; HIGH VOLUME FRACTION; HYDROPHOBIC SURFACES; LASER INTERFERENCE LITHOGRAPHY; MINIMUM VALUE; OPTICAL REFLECTANCE; RIGOROUS COUPLED WAVE ANALYSIS; SUBMICRON;

PERIODIC STRUCTURES;

EID: 84863230441     PISSN: 07403224     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAB.29.000357     Document Type: Article

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