Wide-angle antireflection ZnO films on bullet-like nanostructures of multi-crystalline silicon

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 1, 2012, Pages

  Chen, Sheng Hui ^a   Tseng, Shao Ze ^a   Chen, Wei ^a   Cho, Wen Hao ^b   Chan, Chia Hua ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTI-REFLECTION; ANTIREFLECTION STRUCTURES; ATOMIC LAYER; INCIDENT ANGLES; INDUCTIVELY COUPLED PLASMA DRY ETCHING; MULTI-CRYSTALLINE SILICON; MULTICRYSTALLINE SILICON WAFERS; NANO SPHERE LITHOGRAPHY; SELF-ASSEMBLED; WAVELENGTH RANGES; ZNO FILMS;

ANTIREFLECTION COATINGS; ATOMIC LAYER DEPOSITION; INDUCTIVELY COUPLED PLASMA; METALLIC FILMS; NANOSPHERES; OXIDE FILMS; POLYSILICON; REFLECTION; SEMICONDUCTING SILICON COMPOUNDS; SILICON OXIDES; ZINC OXIDE;

SILICON WAFERS;

EID: 84862918629     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3666040     Document Type: Article

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