Reflection properties of nanostructure-arrayed silicon surfaces

Nanotechnology

Volumn 11, Issue 3, 2000, Pages 161-164

  Hadobas K ^a   Kirsch, S ^a   Carl, A ^a   Acet, M ^a   Wassermann, E F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT INTERFERENCE; LIGHT REFLECTION; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON;

INTERFERENCE LITHOGRAPHY; NANOSTRUCTURED-ARRAYED SILICON SURFACES;

NANOTECHNOLOGY;

EID: 0034275806     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/11/3/304     Document Type: Article

References (14)

1. Bernhard C G 1967 Endeavour 26 79
2. Clapham P B and Hutley M C 1973 Nature 244 281
3. Wilson S J and Hutley M C 1982 Opt. Acta 29 993
4. Enger R C and Case S K 1983 Appl. Opt. 22 3220
5. Hartman N F and Gaylord T K 1988 Appl. Opt. 27 3738
6. Motamedi M E, Southwell W H and Gunning WJ 1992 Appl. Opt. 31 4371
7. Sporn D, Wittwer V, Gombert A, Glaubitt W and Rose K 1997 Spektrum Wissenschaft August 20
8. Lalanne P and Morris G M 1997 Nanotechnology 8 53
9. Raguin D H and Morris G M 1993 Appl. Opt. 32 1154
10. Raguin D H and Morris G M 1993 Appl. Opt. 32 2582
11. Grann E B, Moharam M G and Pommet D A 1995 J. Opt. Soc. Am. A 12 333
12. Wassermann E F, Thielen M, Kirsch S, Pollman A, Weinforth H and Carl A 1998 J. Appl. Phys. 83 1
13. Adachi S 1989 J. Appl. Phys. 66 3224
14. Theiß W 1997 Surf. Sci. Rep. 29 135