Effect of the tip-sample contact force on the nanostructure size fabricated by local oxidation nanolithography

Ultramicroscopy

Volumn 115, Issue , 2012, Pages 7-13

  Hu, Kexiang ^a   Wu, Sen ^b   Huang, Maomao ^b   Hu, Xiaodong ^b   Wang, Qingkang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b TIANJIN UNIVERSITY   (China)

Author keywords

Contact force; Damping ratio; Local anodic oxidation; Nanofabrication; Oscillation amplitude

Indexed keywords

AFM; AMBIENT ATMOSPHERE; ANODIZATIONS; ATOMIC FORCE MICROSCOPE (AFM); CONTACT FORCES; CONTACT MODES; CONTACT-MODE AFM; DAMPING RATIO; FIELD-INDUCED; LOCAL ANODIC OXIDATION; LOCAL OXIDATION; MICRO/NANO DEVICES; NANO-OXIDATION; NANOFABRICATION TECHNIQUES; NANOSTRUCTURE SIZE; OSCILLATION AMPLITUDE; OXIDE STRUCTURES; SI SURFACES; TAPPING MODES; TIP-SAMPLE CONTACT; TUNNELING MICROSCOPES;

ANODIC OXIDATION; ASPECT RATIO; ATOMIC FORCE MICROSCOPY; DAMPING; NANOSTRUCTURES; NANOTECHNOLOGY;

FABRICATION;

NANOMATERIAL; OXIDE; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CONTACT FORCE; ELECTRIC FIELD; FORCE; LOCAL OXIDATION NANOLITHOGRAPHY; NANOFABRICATION; OSCILLATION; PARTICLE SIZE;

EID: 84862827268     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2012.01.009     Document Type: Article

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