Self-assembled monolayer of designed and synthesized triazinedithiolsilane molecule as interfacial adhesion enhancer for integrated circuit

Nanoscale Research Letters

Volumn 6, Issue , 2011, Pages 1-5

  Wang, Fang ^a   Li, Yanni ^a   Wang, Yabin ^a   Cao, Zhuo ^a  

^a NORTHWEST A F UNIVERSITY   (China)

Author keywords

Adhesion; Copper; Diffusion barrier; Self assembled monolayer; Surface chemistry

Indexed keywords

ADHESION IMPROVEMENT; CHEMICAL INTERACTIONS; COPPER DIFFUSION; COPPER FILMS; DESIGN STRATEGIES; INTERFACIAL ADHESIONS; MICROELECTRONIC INDUSTRY; ORGANOSILANES; SMOOTH SURFACE;

COPPER; DIFFUSION BARRIERS; MICROELECTRONICS; MOLECULES; SELF ASSEMBLED MONOLAYERS; SURFACE CHEMISTRY; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

ADHESION;

EID: 84862642353     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-6-483     Document Type: Article

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