Diffusion barrier properties of carboxyl- and amine-terminated molecular nanolayers

Applied Physics Letters

Volumn 85, Issue 4, 2004, Pages 579-581

  Ganesan, P G ^a   Singh, A P ^a   Ramanath, G ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER PROPERTIES; CU-DIELECTRIC INTERFACES; LEAKAGE CURRENT DENSITY; MOLECULAR NANOLAYERS;

ADHESION; AMINES; ANNEALING; CARBOXYLIC ACIDS; COPPER; DIFFUSION; ELLIPSOMETRY; METALLIZING; NANOSTRUCTURED MATERIALS; POLYELECTROLYTES; SUBSTRATES; SURFACE CHEMISTRY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

SELF ASSEMBLY;

EID: 4043079774     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1775035     Document Type: Article

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