Enhanced photoefficiency in positive-tone direct patterning of metal complexes for forming patterned indium tin oxide films

Thin Solid Films

Volumn 520, Issue 18, 2012, Pages 5867-5876

  Cordonier, Christopher E J ^a   Nakamura, Akimasa ^a   Shimada, Kazuhiko ^a   Fujishima, Akira ^a  

^a CENTRAL JAPAN RAILWAY COMPANY   (Japan)

Author keywords

Catechol complex; Direct patterning; Indium tin oxide; Nitrobenzyl; Photolithography; Pyrolysis; Solution deposition; Transparent conducting film

Indexed keywords

CATECHOL COMPLEX; DIRECT-PATTERNING; INDIUM TIN OXIDE; NITROBENZYL; SOLUTION DEPOSITION; TRANSPARENT CONDUCTING FILMS;

CARBOXYLIC ACIDS; CONDUCTIVE FILMS; INDIUM; INDIUM COMPOUNDS; METAL COMPLEXES; OXIDE FILMS; PHENOLS; PHOTOLITHOGRAPHY; PYROLYSIS; RATE CONSTANTS; SOLUBILITY; TIN OXIDES;

TIN;

EID: 84862200190     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.05.008     Document Type: Article

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