Textured indium tin oxide thin films by chemical solution deposition and rapid thermal processing

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3918-3926

  Mottern, Matthew L ^a   Tyholdt, Frode ^b   Ulyashin, Alexander ^c   van Helvoort, Antonius T J ^b   Verweij, Henk ^a   Bredesen, Rune ^b  

^a Ohio State University   (United States)

^b SINTEF MATERIALS AND CHEMISTRY   (Norway)

^c UNIVERSITY OF OSLO   (Norway)

Author keywords

Heterogeneous nucleation and crystallization; Indium tin oxide; Preferential orientation

Indexed keywords

CRYSTALLIZATION; INDIUM COMPOUNDS; MICROSTRUCTURE; NUCLEATION; RAPID THERMAL ANNEALING; REFRACTIVE INDEX; TEXTURES; THERMODYNAMICS; TRANSMISSION ELECTRON MICROSCOPY;

CHEMICAL SOLUTION DEPOSITION; HETEROGENEOUS NUCLEATION AND CRYSTALLIZATION; INDIUM TIN OXIDE; PREFERENTIAL ORIENTATION;

THIN FILMS;

EID: 33846952178     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.015     Document Type: Article

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