Positive and negative photolithographic deposition of titanium dioxide from photosensitive titanium complexes

Journal of Photopolymer Science and Technology

Volumn 19, Issue 4, 2006, Pages 477-486

  Zhang, Xin ^a   Hill, Ross H ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

Film deposition; Lithography; Photochemistry; Titanium complex

Indexed keywords

EID: 33748443971     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.19.477     Document Type: Article

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