Electrostatic tensile testing device with nanonewton and nanometer resolution and its application to C 60 nanowire testing

Journal of Microelectromechanical Systems

Volumn 21, Issue 3, 2012, Pages 523-529

  Tsuchiya, Toshiyuki ^a   Ura, Yasutake ^a,b   Sugano, Koji ^a   Tabata, Osamu ^a  

^a KYOTO UNIVERSITY   (Japan)

^b DENSO CORPORATION   (Japan)

Author keywords

C 60 nanowire; electrostatic devices; nanoelectromechanical systems; tensile testing

Indexed keywords

APPLIED FORCES; COMB-DRIVE ACTUATOR; NANO-SCALE MATERIALS; NANOMETER RESOLUTIONS; TENSILE FORCES; TENSILE TESTING DEVICE; TEST STANDS; YOUNG'S MODULUS;

ELECTROSTATIC DEVICES; ELECTROSTATICS; FULLERENES; MATERIALS TESTING; MATERIALS TESTING APPARATUS; NANOWIRES; NEMS; WIRE;

TENSILE TESTING;

EID: 84861912792     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2182503     Document Type: Article

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