Design and fabrication of a differential capacitive three-axis SOI accelerometer using vertical comb electrodes

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 4, Issue 3, 2009, Pages 345-351

  Tsuchiya, Toshiyuki ^a   Hamaguchi, Hiroyuki ^a   Sugano, Koji ^a   Tabata, Osamu ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Capacitive; Single crystal silicon; SOI; Three axis accelerometer; Vertical comb electrode

Indexed keywords

ACCELEROMETERS; CAPACITANCE; ELECTRODES; FABRICATION; OPTICAL SENSORS; SINGLE CRYSTALS;

CAPACITIVE; SINGLE CRYSTAL SILICON; SOI; THREE-AXIS ACCELEROMETER; VERTICAL COMB ELECTRODE;

SILICON WAFERS;

EID: 67649267416     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20416     Document Type: Article

References (4)

1. Tsuchiya T, Funabashi H. A z-axis differential capacitive SOI accelerometer with vertical comb electrode. Sensors and Actuators 1999; A116:378-383.
2. Milanovic V, Kwon S, Lee LP. High aspect ratio micromirrors with large static rotation and piston actuation. IEEE Photonics Technology Letters 2004; 16(8):1891-1893.
3. Lee JH, Ko YC, Jeong HM, Choi BS, Kim JM, Jeon DY. SOI-based fabrication processes of the scanning mirror having vertical comb fingers. Sensors and Actuators 2002; A102:11-18.
4. Shibata T, Ootani R, Komai K, Inoue T. Basic of mechanics of materials, Chapter 5, Baihukan, Tokyo, 1991.