Mechanical calibration of MEMS springs with sub-micro-Newton force resolution

Sensors and Actuators, A: Physical

Volumn 143, Issue 1, 2008, Pages 136-142

  Miyamoto, Kenji ^a   Jomori, Tomoya ^a   Sugano, Koji ^a   Tabata, Osamu ^a   Tsuchiya, Toshiyuki ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Calibration; Folded beam; Single crystal silicon; Spring constant

Indexed keywords

FORCE MEASUREMENT; SILICON; SILICON WAFERS; SINGLE CRYSTALS;

FOLDED BEAM; SINGLE CRYSTAL SILICON; SPRING CONSTANT;

MEMS;

EID: 40949103142     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.10.042     Document Type: Article

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