A review of visible-range Fabry-Perot microspectrometers in silicon for the industry

Optics and Laser Technology

Volumn 44, Issue 7, 2012, Pages 2312-2320

  Carmo, João Paulo ^a   Rocha, Rui Pedro ^a   Bartek, Marian ^b   De Graaf, Ger ^b   Wolffenbuttel, Reinoud F ^b   Correia, José Higino ^a  

^a UNIVERSITY OF MINHO   (Portugal)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Industrial applications; Integrated silicon microsystem; Microspectrometer

Indexed keywords

BATCH FABRICATION; COMPENSATION TECHNIQUES; CONTROL ELECTRONICS; ELECTROMAGNETIC SPECTRA; FABRY-PEROT; INDUSTRIAL SECTOR; INTERFEROMETRIC TECHNIQUES; MICRO-SPECTROMETER; MICROINSTRUMENTS; MICROSPECTROMETERS; OPTICAL COMPONENTS; RADIATED ENERGIES; SCATTERED LIGHT; SILICON MICROSYSTEM; SPECTRAL COMPONENTS; SPECTRAL CONTENT; VISIBLE RANGE; VISIBLE REGION;

FABRY-PEROT INTERFEROMETERS; INDUSTRIAL APPLICATIONS; INTERFEROMETRY;

INDUSTRY;

EID: 84861526970     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2012.03.036     Document Type: Review

References (45)

1. S. Jia, G. Ding, X. Zhao, C. Yang Novel optic-fiber switches based on the wobble-type MEMS electromagnetic microactuator Optics & Laser Technology 39 2 2007 353 358
2. Y. Li, D. Chen, C. Yang Sub-microns period grating couplers fabricated by silicon mold Optics & Laser Technology 33 8 November 2001 623 626
3. L. Feng, C. Sihai, L. Huan, Z. Yifan, L. Jianjun, G. Yiqing Fabrication and characterization of polydimethylsiloxane concave microlens array Optics & Laser Technology 44 4 2012 1054 1059
4. M.M. Shalaby, M.A. Abdelmoneum, K. Saitou Design of spring coupling for high-Q high-Frequency MEMS filters for wireless applications IEEE Transactions on Industrial Electronics 56 4 2009 1022 1030
5. C.-.D. Liao, J.-.C. Tsai The evolution of MEMS displays IEEE Transactions on Industrial Electronics 56 4 2009 1057 1065
6. B. Jang, A. Hassibi Biosensor systems in standard CMOS processes: fact or fiction? IEEE Transactions on Industrial Electronics 56 4 2009 979 985
7. L. Li, D. Uttamchandani Flip-chip distributed MEMS transmission lines (DMTLs) for biosensing applications IEEE Transactions on Industrial Electronics 56 4 2009 986 990
8. Y.-.T. Lin, Y.-.S. Lin, C.-.H. Chen, H.C. Chen, Y.-.C. Yang, S.-.S. Lu A 0.5 V biomedical system-on-a-chip for intra-body communication system IEEE Transactions on Industrial Electronics 58 2 2011 690 699
9. S.-.K. Kuo, S.-.L. Chen, C.-.T. Lin Design and development of RFID label for steel coil IEEE Transactions on Industrial Electronics 57 6 2010 2180 2186
10. M.A. Alahmad, H.L. Hess Evaluation and analysis of a new solid-state rechargeable microscale lithium battery IEEE Transactions on Industrial Electronics 55 9 2008 3391 3401
11. D.A.C. Enríquez, A.R. Cruz, M.T.M.R. Giraldi Hybrid FBG-LPG sensor for surrounding refractive index and temperature simultaneous discrimination Optics & Laser Technology 44 4 2012 981 986
12. J. Ospina, E. Canuto, A. Molano Jimenez, W. Acuña-Bravo Multilayer control of an optical reference cavity for space applications IEEE Transactions on Industrial Electronics 57 7 2010 2507 2518
13. B.G. Grossman, S. Boonsopa, M. Sokol Lead-insensitive fiber optic pH sensor and performance under bending Optics & Laser Technology 37 3 2005 199 209
14. T. Bifano MEMS deformable mirrors Nature Photonics 5 2011 21 23
15. S.-.H. Kong, D.D.L. Wijngaards, R.F. Wolffenbuttel Infrared micro-spectrometer based on a diffraction grating Sensors and Actuators A: Elsevier Science 92 2001 88 95
16. A. Sakudoa, Y. Suganumaa, T. Kobayashia, T. Onoderac, K. Ikuta Near-infrared spectroscopy: promising diagnostic tool for viral infections Biochemical and Biophysical Research Communications: Elsevier Science 341 2006 279 284
17. H. Huang, H. Yu, H. Xu, Y. Ying Near infrared spectroscopy for on/in-line monitoring of quality in foods and beverages: a review Journal of Food Engineering: Elsevier Science 87 2008 303 313
18. A.C. Moffat, S. Assi, R.A. Watt Identifying counterfeit medicines using near infrared spectroscopy Journal of Near Infrared Spectroscopy 18 2010 1 15
19. J.B. Reeves, G.W. McCarty, V.B. Reeves Mid-infrared diffuse reflectance spectroscopy for the quantitative analysis of agricultural soils Journal of Agricultural and Food Chemistry 49 2 2001 766 772
20. M. Safar, D. Bertrand, P. Robert, M.F. Devalued, C. Genot Characterization of edible oils, butters and margarines by Fourier transform infrared spectroscopy with attenuated total reflectance Journal of American Oil Chemists Society 71 4 1994 371 377
21. E.G. Bartick Applications of Vibrational Spectroscopy in Criminal Forensic Analysis 2006 Handbook of Vibrational Spectroscopy
22. A.V. Fernandes, V.F. Cardoso, J.G. Rocha, G. Minas Smart-optical detector CMOS array for biochemical parameters analysis in physiological fluids IEEE Transactions on Industrial Electronics 55 9 2008 3192 3200
23. J. de Hoog, J. Osán, I. Szalóki, K. Eyckmans, A. Worobiec, C.-.U. Ro, R. Van Grieken Thin-windows electron probe X-ray micro-analysis of individual atmospheric particles above the North Sea Atmospheric Environment 39 2005 3231 3242
24. G. de Graaf, W. der Vlist, R.F. Wolffenbuttel Design and fabrication steps for a MEMS-based infrared spectrometer using evanescent wave sensing Sensors and Actuators A: Elsevier Science 142 2008 211 216
25. R.F. Wolffenbuttel State-of-the-art in integrated optical microspectrometers IEEE Transactions on Instrumentation and Measurement 53 1 2004 197 201
26. R.F. Wolffenbuttel MEMS-based optical mini and microspectrometers for the visible and infrared spectral range Journal of Micromechanics and Microengineering: Institute of Physics (IOP) 15 2005 S145 S152
27. A. Emadi, H. Wu, S. Grabarnik, G. de Graaf, K. Hedsten, P. Enoksson, J.H. Correia, R.F. Wolfenbuttel Fabrication and characterization of IC-compatible linear variable optical filters with application in a micro-spectrometer Journal Sensors and Actuators A: Elsevier Science 162 2010 400 405
28. S. Sailaja, V. Arora, S.R. Kumbhare, R.A. Joshi, P.A. Naik, P.D. Gupta Transmission grating spectrograph with on-line recording of XUV soft X-ray spectra from laser produced plasmas Optics & Laser Technology 38 1 2006 46 50
29. J. Liu, H. Gao, J. Zhou, D. Liu The design of a polarizing beam splitter made from a dielectric rectangular-groove grating Optics & Laser Technology 41 5 2009 622 626
30. G. Kloos Design of a Michelson interferometer for the measurement of electrostrictive strains Optics & Laser Technology 28 6 1996 481 484
31. A. Srivastava, M.M. Gupta, S. Medhekar Signal amplification based on the local nonlinear Mach-Zehnder interferometer Optics & Laser Technology 44 2 2012 492 496
32. G. Papadopoulos, K.E. Zoiros On the design of semiconductor optical amplifier-assisted Sagnac interferometer with full data dual output switching capability Optics & Laser Technology 43 3 2011 697 710
33. Z. Wu, G. X Transmission of a gaussian beam after incidenting nonnormally on a Fabry-Perot etalon: a nonresonant case Optics & Laser Technology 35 2 2003 123 126
34. S.-H. Kong, R.F. Wolffenbuttel Spectral performance of a micromachined infrared spectrum analyzer in silicon IEEE Transactions on Instrumentation and Measurement 54 1 2005 264 267
35. S. Grabarnik, A. Emadi, H. Wu, G. de Graaf, G. Vdovin, R.F. Wolffenbuttel Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph Journal of Micromechanics and Microengineering 18 064006 2008 1 6
36. Thomas K. Chien-I Lin Gaylord, loss measurement of plasmonic modes in planar metal-insulator-metal waveguides by an attenuated total reflection method Optics Letters 35 22 2010 3814 3816
37. G. Hass Filmed surfaces for reflecting optics Journal of Optical Society of America 45 11 1955 945 953
38. M. Bartek, J. Correia, R.F. Wolffenbuttel Silver-based reflective coatings for micromachined optical filters Journal of Micromechanics and Microengineering: Institute of Physics (IOP) 9 1999 162 165
39. J.H. Correia, G. de Graaf, M. Bartek, R.F. Wolffenbuttel A CMOS optical microspectrometer with light-to-frequency converter, bus interface and stray-light compensation IEEE Transactions Instrumentation & Measurement 50 6 2001 1530 1537
40. A. Emadi, H. Wu, S. Grabarnik, G. de Graaf, K. Hedsten, P. Enoksson, J.H. Correia, R.F. Wolfenbuttel Fabrication and characterization of IC-compatible linear variable optical filters with application in a micro-spectrometer Journal Sensors and Actuators A 162 2010 400 405
41. Chang, C-P, Huang, R-S, A 16-channel array-type microspectrometer using integrated Fabry-Perot etalons and lateral PIN photodetectors, in Proc. of IEEE Sensors 2003 (Second IEEE International Conference On Sensors), pp.675-678, 2003.
42. D. Rossberg Optical properties of the integrated infrared sensor Journal Sensors and Actuators A: Elsevier Science 54 1996 793 797
43. E. Ribeiro, A. Malczyka, S. Carvalhoa, L. Rebouta, J.V. Fernandes, E. Alves, A.S. Miranda Effects of ion bombardment on properties of d.c. sputtered superhard (Ti, Si, Al)N nanocomposite coatings Surface Coating Technology 515 2002 151 152
44. K.-.R. Sui, Y.-.W. Shi, X.-.L. Tang, X.-.S. Zhu, K. Iwai, M. Miyagi Optical properties of AgI/Ag infrared hollow fiber in the visible wavelength region Optics Letters 33 2008 318 320
45. F. Morichetti, A. Canciamilla, A. Melloni Statistics of backscattering in optical waveguides Optics Letters 35 2010 1777 1779