Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

Journal of Micromechanics and Microengineering

Volumn 18, Issue 6, 2008, Pages

  Grabarnik, S ^a   Emadi, A ^a   Wu, H ^a   De Graaf, G ^a   Vdovin, G ^a   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; DIFFRACTION; DIFFRACTION GRATINGS; FABRICATION; LIGHT; MEMS; MICROELECTROMECHANICAL DEVICES; SPECTROMETERS; SPECTROMETRY;

COLLIMATING OPTICS; ELECTRONIC PARTS; ELECTRONIC SYSTEMS; GLASS PLATES; GLASS WAFERS; MEMS TECHNOLOGIES; OPERATING RANGES; OPTICAL SPECTROMETERS; OPTICAL-; PLANAR GRATINGS; PLANAR IMAGING; SYSTEM INTEGRATIONS;

GLASS;

EID: 57249091654     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/6/064006     Document Type: Conference Paper

References (11)

1. Wolffenbuttel R F 2005 MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range J. Micromech. Microeng. 15 S145-52
2. Kwa T A and Wolffenbuttel R F 1992 Integrated grating/detector array fabricated in silicon using micromachining techniques Sensors Actuators A 31 259-66
3. Kong S H and Wolffenbuttel R F 2005 Spectral performance of a micromachined infrared spectrum analyzer in silicon IEEE Trans. Instrum. Meas. 54 264-7
4. Yen H W, Friedrich H R, Morrison R J and Tangonan G L 1981 Planar Rowland spectrometer for fiber-optic wavelength demultiplexing Opt. Lett. 6 639-41
5. Sander D and Muller J 2001 Selffocusing phase transmission grating for an integrated optical microspectrometer Sensors Actuators A 88 1-9
6. Avrutsky I, Chaganti K, Salakhutdinov I and Auner G 2006 Concept of a miniature optical spectrometer using integrated optical and micro-optical components Appl. Opt. 45 7811-7
7. Ura S, Okayama F, Shiroshita K, Nishio K, Sasaki T, Nishihara H, Yotsuya T, Okano M and Satoh K 2003 Planar reflection grating lens for compact spectroscopic imaging system Appl. Opt. 42 175-80
8. Ura S, Sasaki T and Nishihara H 2001 Combination of grating lenses for color splitting and imaging Appl. Opt. 40 5819-24
9. Kostuk R K, Goodman J W and Hesselink L 1987 Design considerations for holographic optical interconnects Appl. Opt. 26 3947-53
10. Noda H, Namioka T and Seya M 1974 Geometric theory of the grating J. Opt. Soc. Am. 64 1031-6
11. Palmer C and McKinney W R 1994 Imaging theory of plane-symmetric varied line-space grating systems Opt. Eng. 33 820-9