Novel optic-fiber switches based on the wobble-type MEMS electromagnetic microactuator

Optics and Laser Technology

Volumn 39, Issue 2, 2007, Pages 353-358

  Jia, Shuhai ^a   Ding, Guifu ^b   Zhao, Xiaolin ^b   Yang, Chunsheng ^b  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Electromagnetic microactuator; Micro electro mechanical system; Optic fiber switch

Indexed keywords

CROSSTALK; ELECTRIC POTENTIAL; MICROACTUATORS; MIRRORS; OPTICAL COMMUNICATION; STATORS; TORQUE;

ELECTROMAGNETIC MICROACTUATOR; MICRO-ELECTRO-MECHANICAL SYSTEM; OPERATING VOLTAGE; OPTIC-FIBER SWITCH;

OPTICAL SWITCHES;

EID: 33748310901     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2005.07.003     Document Type: Article

References (18)

1. Aksyuk V., Barber B., Giles C.R., et al. Low insertion loss packaged and fibre connectorised MEMS reflective optical switch. Elect Lett 34 14 (1998) 1413-1414
2. Ollier O., Labeye P., and Revol F. Micro-opto-mechanical switch in integrated optics on silicon. Elect Lett 31 23 (1995) 2003-2004
3. Ollier E., and Mottier P. Integrated electrostatic micro-switch for optical fibre networks driven by low voltage. Elect Lett 32 21 (1996) 2007-2008
4. Lee S.S., Lin L.Y., and Wu M.C. Surface-micromachined free-space fibre-optic switches. Elect Lett 31 17 (1995) 1481-1482
5. Miller RA, Tai YC, Xu G, et al. An electromagnetic MEMS 2×2 fiber optic bypass switch. In: Proceedings of the international conference on solid state sensors and actuators (Transducers '97), Chicago, IL, June 16-19 1997. p. 89-92.
6. Lee S.S., Huang L.S., Kim C.J., et al. Free-space fiber-optic switches based on MEMS vertical torsion mirrors. IEEE J Lightwave Tech 17 1 (1999) 7-13
7. Kato Y, Norimatsu T, Imaki O, et al. Development of a multi-channel 2×2 optical switch. IEEE/LEOS international conference on optical MEMS, Lugano, Switzerland, August 20-23 2002. ThB3: p. 161-2.
8. Li J., Zhang Q.X., and Liu A.Q. Advanced fiber optical switches using deep RIE (DRIE) fabrication. Sensors and Actuators A 102 (2003) 286-295
9. Lin L.Y., Goldstein E.L., and Tkach R.W. Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnects. IEEE Photon Tech Lett 10 4 (1998) 525-527
10. Lin L.Y., Goldstein E.L., Simmons J.M., et al. High-density micromachined polygon optical crossconnects exploiting network connection-symmetry. IEEE Photon Tech Lett 10 10 (1998) 1425-1427
11. Aksyuk V.A., Pardo F., Bolle C.A., et al. Lucent microstar micromirror array technology for large optical cross connects. Proc SPIE 4178 (2000) 320-324
12. Hagelin P.M., Krishnamoorty U., Heritage J.P., et al. Scalable optical cross-connect switch using micromachined mirrors. IEEE Photon Tech Lett 12 7 (2000) 882-884
13. Syms R.R.A. Scaling laws for MEMS mirror-rotation optical cross connect switches. IEEE J Lightwave Tech 20 7 (2002) 1084-1094
14. Zhang C., Zhao X.L., Yang C.S., et al. Crux technology for practicality of micro-motor and its application prospect. J Shanghai Jiaotong University 34 3 (2000) 430-432
15. Zhao X.L., Ding G.F., Zhang M.S., et al. Research on electromagnetic motor's stator winding with embedded magnetic core. Microfabrication Technology 4 (1999) 62-66
16. Lin X.H. Passive optical components (1998), People'S Posts & Telecommunications Publishing House, Beijing 168-170
17. Yang C.S., Zhao X.L., Ding G.F., et al. An axial flux electromagnetic micromotor. J. Micromech Microeng 11 2 (2001) 113-117
18. Zhang M.S., Cai B.C., and Zhao X.L. Three-dimensional magnetic field analysis of micromotor by fast Fourier transform. IEEE Trans Magnet 35 5 (1999) 3685-3687