A 16-channel array-type microspectrometer using integrated Fabry-Perot etalons and lateral pin photodetectors

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 675-678

  Chang, Chin Piao ^a   Huanq, Ruey Shing ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETALONS; LITHOGRAPHY; MICROSCOPIC EXAMINATION; MIRRORS; MONOCHROMATORS; PHOTODETECTORS; PHOTODIODES; PHOTORESISTS; POLYSILICON; PRODUCT DESIGN; SILICA; SILICON WAFERS;

FABRY-PEROT ETALONS; MICROSPECTROMETERS; OPTICAL SIMULATION; PREBUCKLED BRIDGES;

SPECTROMETERS;

EID: 1542363509     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. J.H.Jerman, J.J.Clift, "A Miniature Fabry-Perot Interferometer with a Corrugated Silicon Diaphragm Support," Sensors and Actuators A, 29, pp151-158, 1991.
2. J.H.Correia, M.Bartek, R.F.Wolffenbuttel, "Bulk-Micromachined tunable Fabry-Perot microinterferometer for the visible spectral range,"Sensors and Actuators, A 76, pp,191-196, 1999.
3. K.Aratani, P.J.French, P.M.Sarro, D.Poenar, R.F.Wolffenbuttel, "Surface Micromachined Tunable Interferometer Array," Sensors and Actuators, A 43, pp. 17-23, 1994.
4. José Higino Correia, Marian Bartek, and Reinoud F. Wolffenbuttel, "High-Selectivity Single-Chip Spectrometer in Silicon for Operation at Visible Part of the Spectrum,"IEEE Transactions on Electron Devices, Vol. 47, No. 3, pp.553-559, 2000.