State-of-the-art in integrated optical microspectrometers

IEEE Transactions on Instrumentation and Measurement

Volumn 53, Issue 1, 2004, Pages 197-202

  Wolffenbuttel, Reinoud F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Integrated silicon microsystem; Microelectromechanical systems (MEMS); Optical sensor; Spectrometer

Indexed keywords

LENSES; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL SENSORS; OPTICAL WAVEGUIDES; PHOTODIODES;

INTEGRATED SILICON MICROSYSTEM; INTELLIGENT OPTOELECTRONIC SYSTEM-ON-A-CHIP; OPTICAL MICROSPECTROMETERS; OPTICAL SIGNAL CONDITIONING;

SPECTROMETERS;

EID: 0742301717     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2003.821490     Document Type: Article

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