Spectral performance of a micromachined infrared spectrum analyzer in silicon

IEEE Transactions on Instrumentation and Measurement

Volumn 54, Issue 1, 2005, Pages 264-267

  Kong, Seong Ho ^a,b   Wolffenbuttel, Reinoud F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Kyungpook National University   (South Korea)

Author keywords

Infrared spectrum analyzer; Microspectrometer; Optical sensor

Indexed keywords

DIFFRACTION GRATINGS; INFRARED RADIATION; MICROMACHINING; OPTICAL DESIGN; OPTICAL SENSORS; OPTOELECTRONIC DEVICES; SILICON WAFERS; SPECTROMETERS; SPECTRUM ANALYSIS; THERMOCOUPLES;

INFRARED SPECTRUM ANALYZER; MICROSPECTROMETER;

SPECTRUM ANALYZERS;

EID: 13244251221     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2004.834050     Document Type: Article

References (13)

1. B. Stuart, Modern IR Spectroscopy. New York: Wiley, 1996.
2. V. Iordanov, G. Lubking, R. Ishihara, R. E Wolffenbuttel, P. M. Sarro, and M. J. Vellekoop, "Silicon thin-film UV filter for NADH analysis," Sens. Actuators, vol. A97-98, pp. 161-166, 2002.
3. D. Rossberg, "Silicon micromachined infrared sensor with tuneable wavelength selectivity for application in infrared spectroscopy," Sensors Actuators, vol. A 46-47, pp. 413-416, 1995.
4. G. Minas, J. S. Martins, C. Pereira, C. Lima, R. F. Wolffenbuttel, and J. H. Correia, "Lab-on-a-chip for measuring uric acid in biological fluids," in Proc. Eurosensors XVI, Prague, Czech Rep., Sep. 15-18, 2002, pp. 6-69.
5. P. Lindblom, M. Meinander, and T. Olsson, "Spectroscopy with the MEGA spectrometer, A very high resolution grating spectrometer," Rev. Sci. Instrum., vol. 61, pp. 2546-2548, 1990.
6. R. F. Wolffenbuttel, Ed., Silicon Sensors and Circuits: On-Chip Compatibility. London, U.K.: Chapman & Hall, 1996.
7. R. F. Wolffenbuttel, "Silicon photodetectors with a selective spectral response," in Sensors Update, H. Baltes, J. Hesse, and J. Korvink, Eds. New York: Wiley-VCH, 2001, vol. 9, pp. 69-101.
8. T. A. Kwa and R. F. Wolffenbuttel, "Integrated grating/detector array fabricated in silicon using micromachining techniques," Sensors Actuators, vol. A31, pp. 259-266, 1992.
9. G. M. Yee, N. Maluf, P. A. Hing, M. Albin, and G. T. A. Kovacs, "Miniature spectrometers for biochemical analysis," Sensors Actuators, vol. A58, pp. 61-66, 1997.
10. S. H. Kong, D. D. L. Wijngaards, and R. F. Wolffenbuttel, "Infrared micro-spectrometer based on a diffraction grating," Sens. Actuators vol. A92, pp. 88-95, 2001.
11. J. H. Correia, M. Bartek, and R. F. Wolffenbuttel, "High-selectivity single-chip spectrometer in silicon for operation in the visible part of the spectrum,"IEEE Trans. Electron Devices, vol. 47, pp. 553-559, Mar. 2000.
12. J.H. Jerman, D. J. Clift, and S. R. Mallinson, "A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support," Sensors Actuators, vol. A29, pp. 151-158, 1991.
13. M. Bom and E. Wolf,Principles of Optics, fifth ed. New York: Pergamon, 1975.