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Volumn 142, Issue 1, 2008, Pages 211-216
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Design and fabrication steps for a MEMS-based infrared spectrometer using evanescent wave sensing
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Author keywords
ATR; Infrared emitter; Internal reflection spectroscopy; Spectrometer; Thermopile
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Indexed keywords
DIES;
MACHINE DESIGN;
MEMS;
MICROMACHINING;
REFLECTION;
SILICON;
THERMOPILES;
INFRARED EMITTERS;
INTERNAL REFLECTION SPECTROSCOPY;
SILICON DIES;
INFRARED SPECTROMETERS;
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EID: 38849111805
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sna.2007.09.009 Document Type: Article |
Times cited : (14)
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References (10)
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