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Volumn 142, Issue 1, 2008, Pages 211-216

Design and fabrication steps for a MEMS-based infrared spectrometer using evanescent wave sensing

Author keywords

ATR; Infrared emitter; Internal reflection spectroscopy; Spectrometer; Thermopile

Indexed keywords

DIES; MACHINE DESIGN; MEMS; MICROMACHINING; REFLECTION; SILICON; THERMOPILES;

EID: 38849111805     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.09.009     Document Type: Article
Times cited : (14)

References (10)
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    • MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range
    • Wolffenbuttel R.F. MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range. J. Micromech. Microeng. 15 (2005) 145-152
    • (2005) J. Micromech. Microeng. , vol.15 , pp. 145-152
    • Wolffenbuttel, R.F.1
  • 4
    • 6244276308 scopus 로고
    • Use of infrared absorption in germanium to determine carrier distributions for injection and extraction
    • Harrick N.J. Use of infrared absorption in germanium to determine carrier distributions for injection and extraction. Phys. Rev. 103 (1956) 1173
    • (1956) Phys. Rev. , vol.103 , pp. 1173
    • Harrick, N.J.1
  • 5
    • 50549170906 scopus 로고
    • Attenuated total reflection. A new principle for the production of useful spectra of organic compounds
    • Fahrenfort J. Attenuated total reflection. A new principle for the production of useful spectra of organic compounds. Spectrochim. Acta 17 (1961) 698
    • (1961) Spectrochim. Acta , vol.17 , pp. 698
    • Fahrenfort, J.1
  • 6
    • 0042045277 scopus 로고    scopus 로고
    • Addison-Wesley, San Francisco, CA, USA. 0-8053-8566-5
    • Hecht E. Optics. 4th ed. (2002), Addison-Wesley, San Francisco, CA, USA. 0-8053-8566-5
    • (2002) Optics. 4th ed.
    • Hecht, E.1
  • 7
    • 38849138876 scopus 로고    scopus 로고
    • D.J. Segelstein, The complex refractive index of water, MSc Thesis (M.S.), Department of Physics, University of Missouri, Kansas City, 1981.
    • D.J. Segelstein, The complex refractive index of water, MSc Thesis (M.S.), Department of Physics, University of Missouri, Kansas City, 1981.
  • 8
    • 50749135770 scopus 로고
    • A silicon-silicon nitride membrane fabrication process for smart thermal sensors
    • Sarro P.M., van Herwaarden A.W., and van der Vlist W. A silicon-silicon nitride membrane fabrication process for smart thermal sensors. Sens. Actuators A 42 (1994) 666-671
    • (1994) Sens. Actuators , vol.A 42 , pp. 666-671
    • Sarro, P.M.1    van Herwaarden, A.W.2    van der Vlist, W.3
  • 10
    • 38849175993 scopus 로고    scopus 로고
    • Silicon compatible Fabry-Perot optical filter for infra-red microspectrometer application, TIC-P2
    • Goteborg, Sweden
    • Emadi A., de Graaf J.H., and Wolffenbuttel R.F. Silicon compatible Fabry-Perot optical filter for infra-red microspectrometer application, TIC-P2. Proceedings of the Eurosensors XXX. Goteborg, Sweden (September 17-20, 2006)
    • (2006) Proceedings of the Eurosensors XXX
    • Emadi, A.1    de Graaf, J.H.2    Wolffenbuttel, R.F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.