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Volumn 8, Issue 10, 2012, Pages 1521-1526

3D nanofluidic channels shaped by electron-beam-induced etching

(3) Perry, John M a Harms, Zachary D a Jacobson, Stephen C a

a INDIANA UNIVERSITY (United States)

Author keywords

electron beam lithography; electron beam induced etching; high modulus poly(dimethylsiloxane); nanofabrication; nanofluidics

Indexed keywords

3-D TOPOGRAPHY; NANO CHANNELS; NANOFLUIDIC CHANNEL; SU-8 RESISTS;

ELECTRON BEAM LITHOGRAPHY; ETCHING; NANOFLUIDICS; NANOTECHNOLOGY;

THREE DIMENSIONAL;

EID: 84861145120 PISSN: 16136810 EISSN: 16136829 Source Type: Journal
DOI: 10.1002/smll.201102240 Document Type: Article

Times cited : (19)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.