Nanostructure fabrication by ultra-high-resolution environmental scanning electron microscopy

Nano Letters

Volumn 7, Issue 2, 2007, Pages 525-530

  Toth, Milos ^a   Lobo, Charlene J ^b   Knowles, W Ralph ^a   Phillips, Matthew R ^b   Postek, Michael T ^c   Vladár, András E ^c  

^a Thermo Fisher Scientific   (United States)

^b UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGING ARTIFACTS; ELECTRON BEAM INDUCED DEPOSITION (EBID); ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY (ESEM); SUBSTRATE CHARGING;

ELECTRON BEAMS; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BEAM ASSISTED DEPOSITION; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

NANOWIRES;

EID: 33847697822     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl062848c     Document Type: Article

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