A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 176-179

  Pan, Wanling ^a   Abdolvand, Reza ^a,b   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b OKLAHOMA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; REACTIVE ION ETCHING; SUBSTRATES; TELECOMMUNICATION SYSTEMS; THIN FILM DEVICES; WAVE FILTERS;

1.8 GHZ; ACOUSTIC VELOCITIES; COUPLED MODES; ELECTRODE STRUCTURES; FREQUENCY RANGING; INSERTION LOSSES; INTERNATIONAL CONFERENCES; LOW LOSSES; MICRO-ELECTRO MECHANICAL SYSTEMS; PIEZOELECTRIC LAYERS; RESONANT STRUCTURES; SPURIOUS MODES; SUBSTRATE LAYERS;

LOSSES;

EID: 50149116603     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443621     Document Type: Conference Paper

References (8)

1. K. M. Lakin, "Thin Film Resonators and Filters", in Proc. IEEE Ultrasonics Symposium, 1999, pp. 895-906.
2. R. Aigner, S. Marksteiner, L. Elbrecht, W. Nessler, "RF-Filters in Mobile Phone Applications", in Tech. Digest TRANSDUCERS'03 Conference, 2003, pp. 891-894.
3. R. A. Sykes, W. D. Beaver, "High Frequency Monolithic Crystal Filters with Possible Application to Single Frequency and Single Side Band Use", in Proc. IEEE Ultrasonics Symposium, 1966, pp. 288-308.
4. K. M. Lakin, "Coupled Resonator Filters", in Proc. IEEE Ultrasonics Symposium, 2002, pp. 901-908.
5. R. Abdolvand, F. Ayazi, "Monolithic Thin-Film Piezoelectric-on- Substrate Filters", in Tech. Digest IMS'07 Conference, 2007, pp. 509-512.
6. L. N. Dworsky, "A Comparison of Band Pass Filter Technologies for Communications System Applications", in Proc. IEEE Ultrasonics Symposium, 1991, pp. 241-250.
7. W. P. Mason, "A Dynamic Measurement of the Elastic, Electric and Piezoelectric Constants of Rochelle Salt", Physical Review, Vol. 55, pp. 775-789, 1939.
8. J. F. Rosenbaum, Bulk Acoustic Wave Theory and Devices, Artech House, Inc., Norwood, MA, 1988.