Ion beam irradiation of nanostructures - A 3D Monte Carlo simulation code

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 269, Issue 19, 2011, Pages 2133-2138

  Borschel, C ^a   Ronning, C ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Implantation; Ion beam irradiation; Monte Carlo; Nanostructures; Nanowire

Indexed keywords

3-DIMENSIONAL STRUCTURES; 3D MONTE CARLO SIMULATION; COMPUTER CODES; DAMAGE CASCADES; ENERGETIC ION; IMPLANTATION DAMAGE; IMPLANTED IONS; ION BEAM IMPLANTATION; ION BEAM IRRADIATION; ION RANGES; MONTE CARLO; MONTE CARLO ALGORITHMS;

BEAM PLASMA INTERACTIONS; ION BEAMS; ION BOMBARDMENT; MONTE CARLO METHODS; NANOWIRES; THREE DIMENSIONAL;

IONS;

EID: 84860389561     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2011.07.004     Document Type: Article

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