Focused ion beam-assisted bending of silicon nanowires for complex three dimensional structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 3043-3047

  Jun, Kimin ^a   Joo, Jaebum ^a   Jacobson, Joseph M ^a  

^a MIT MEDIA LAB   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D STRUCTURE; BEAM IRRADIATION; BENDING STRUCTURES; COMPLEX THREE DIMENSIONAL STRUCTURES; CONTROLLING PARAMETERS; GENERAL CLASS; HIGH DENSITY; HIGH PERFORMANCE DEVICES; NANOWIRE STRUCTURES; ON THE FLIES; SILICON NANOWIRES; THREE-DIMENSIONAL (3D);

ELECTRIC WIRE; FOCUSED ION BEAMS; NANOWIRES;

THREE DIMENSIONAL;

EID: 72849108106     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3259919     Document Type: Conference Paper

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