A computationally efficient simulator for three-dimensional Monte Carlo simulation of ion implantation into complex structures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 184, Issue 4, 2001, Pages 500-508

  Li, Di ^a   Wang, Geng ^a   Chen, Yang ^a   Lin, Li ^a   Shrivastav, Gaurav ^a   Oak, Stimit ^a   Tasch, Al ^a   Banerjee, Sanjay ^a   Obradovic, Borna ^b  

^a The University of Texas at Austin   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; MONTE CARLO METHODS; POLYSILICON; SECONDARY ION MASS SPECTROMETRY;

MULTI-MATERIAL SYSTEMS;

ION IMPLANTATION;

EID: 0035577250     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00699-1     Document Type: Article

References (13)