Fabrication of microstructures on glass by imprinting in conventional furnace for lab-on-chip application

Microelectronic Engineering

Volumn 95, Issue , 2012, Pages 90-101

  Chen, Qiuling ^a   Chen, Qiuping ^a   MacCioni, Gabriele ^a,b   Sacco, Adriano ^a,b   Ferrero, Sergio ^a   Scaltrito, Luciano ^a  

^a POLITECNICO DI TORINO   (Italy)

^b ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

Author keywords

Conventional furnace; Glass imprinting; Laser direct writing; Ni alloy mold

Indexed keywords

CONVENTIONAL FURNACE; DIODE PUMPED SOLID STATE LASER; DNA ANALYSIS; ENERGY DISPERSIVE X-RAY; FIELD EFFECTS; KEY PARAMETERS; LAB-ON-CHIP; LASER DIRECT WRITING; LOW COSTS; MICRO-PROFILOMETER; MICROFLUIDIC CHIP; NI ALLOYS; OPTIMAL COMBINATION; VACUUM CHAMBERS;

FLUIDICS; FURNACES; GLASS; MOLDS; NICKEL ALLOYS; SCANNING ELECTRON MICROSCOPY;

VACUUM FURNACES;

EID: 84860381517     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.01.007     Document Type: Article

References (22)

1. M. Komori, H. Uchiyama, and H. Takebe J. Micromech. Microeng. 18 6 2008 065013
2. Chen. Qiuping, Chen. Qiuling, Milanese. Daniel, and Ferraris. Monica J. Microsys. Technol. 15 2009 1067 1071
3. Maccioni Gabriele, Carlos Martìnez de Marigorta, Chen Qiuling, et al., in: Proceedings of the Fifth International WLT-Conference on Lasers in Manufacturing, Munich, 2009.
4. W. Kurnia, and M. Yoshino J. Micromech. Microeng. 19 2009 125028
5. S.W. Youn, M. Takahashi, H. Goto, and R. Maeda Microelectron. Eng. 83 2006 2482 2492
6. Wu Chih-Wei, and TSAI Jin-Rong TSAI Hung-Yin J. Mech. Sci. Technol. 21 2007 1498 1504
7. S.W. Youn, M. Takahashi, H. Goto, and R. Maeda J. Mater. Process. Technol. 187-188 2007 326 330
8. A.A. Tseng, and J. Recent Micromech. Microeng. 14 2004 R15 R34
9. M.D. Fagan, and B.H. Kim J. Adv. Polym. Tech. 28 4 2009 246 256
10. D.C. Vreeland Mater. Performance 15 10 Oct. 1976 38 41
11. Du Liqun, Liu Chong, Luo Yi, in: Proceedings of 2004 International Symposium on Micro/Nano Mechatronics and Science, 2004, 237-242.
12. M. Mullenborn Sens. Actuators, A 52 1996 121 125
13. J. Chang J. Laser Appl. 10 6 1998 285 290
14. Knowles M.R.H. et al., A.J. Kearsley, in: Proceedings of ICALEO 1998, Section A, 1998 pp. 112-120.
15. Dong Hyuck Kam, Thesis of Laser Direct Writing of Microchannels for Artificial Lungs.
16. A. Soveja, J.M. Jouvard, D. Grevey, in: Excerpt from the Proceedings of the COMSOL Users Conference Grenoble, 2007.
17. D.H. Kam, L. Shah, and J. Mazumder J. Micromech. Microeng. 21 2011 045027
18. Ji.-Yen. Cheng J. Micromech. Microeng. 15 2005 1147 1156
19. J.M. Fernández-Pradas, D. Serrano, P. Serra, and J.L. Morenza Appl. Surf. Sci. 255 2009 5499 5502
20. Qiuping Chen, Qiuling Chen, and Monica Ferraris J. Microsys. Technol. 16 2010 527 532
21. V. Casalegno, Qiuping Chen, Qiuling Chen, M. Salvo, F. Smeacetto, A. Ventrella, and M. Ferraris Key Eng. Mater. 434-435 2010 197 201
22. Qiuping Chen, Qiuling Chen, Daniel Milanese, and Monical Ferraris J. Microsys. Technol. 12 2009 1873 1877