Fabrication of micro-mold for glass embossing using focused ion beam, femto-second laser, eximer laser and dicing techniques

Journal of Materials Processing Technology

Volumn 187-188, Issue , 2007, Pages 326-330

  Youn, S W ^a   Takahashi, M ^a   Goto, H ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Dicing; Eximer laser; Femto second laser; Focused ion beam; Glasses; Glassy carbon; Hot embossing; Micro mold

Indexed keywords

FOCUSED ION BEAMS; GLASS; LASER ABLATION; NANOSTRUCTURES; ULTRASHORT PULSES;

DICING; EXIMER LASERS; GLASSY CARBON (GC); HOT EMBOSSING;

MICROSTRUCTURE;

EID: 33947104604     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2006.11.120     Document Type: Article

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