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Volumn 10, Issue 6, 1998, Pages 285-291

Precision micromachining with pulsed green lasers

Author keywords

Copper vapor lasers; Laser materials processing; Laser micromachining; Microfabrication

Indexed keywords


EID: 0000389669     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.521863     Document Type: Article
Times cited : (104)

References (12)
  • 2
    • 33744715689 scopus 로고
    • Waveguide excimer laser fabrication of 3D microstructures
    • C. Paul Christensen, "Waveguide excimer laser fabrication of 3D microstructures," Proc. SPIE 2045, 141-145 (1994).
    • (1994) Proc. SPIE , vol.2045 , pp. 141-145
    • Christensen, C.P.1
  • 3
    • 33744664942 scopus 로고
    • Laser cut microscopic paths with major potential
    • July
    • E. Wiener-Avnear, "Laser cut microscopic paths with major potential," Laser Focus World July 75-80 (1993).
    • (1993) Laser Focus World , pp. 75-80
    • Wiener-Avnear, E.1
  • 4
    • 33744636760 scopus 로고
    • Electronics makers switch to precise micro machining tools
    • March
    • J. Hobbs, "Electronics makers switch to precise micro machining tools," Laser Focus World March 69-72 (1994).
    • (1994) Laser Focus World , pp. 69-72
    • Hobbs, J.1
  • 6
    • 0042438037 scopus 로고
    • Green lasers score good marks in semiconductor material processing
    • June
    • J. Golden, "Green lasers score good marks in semiconductor material processing," Laser Focus World June 75-88 (1992).
    • (1992) Laser Focus World , pp. 75-88
    • Golden, J.1
  • 7
    • 0000007326 scopus 로고    scopus 로고
    • Laser-plasma interaction during visible laser ablation of metals
    • J. Chang and B. Warner, "Laser-plasma interaction during visible laser ablation of metals," Appl. Phys. Lett. 69, 473-475 (1996).
    • (1996) Appl. Phys. Lett. , vol.69 , pp. 473-475
    • Chang, J.1    Warner, B.2
  • 9
    • 0000087513 scopus 로고
    • A thermal-mechanical model for laser ablation
    • A. Zweig, "A thermal-mechanical model for laser ablation," J. Appl. Phys. 70, 1684-1691 (1991).
    • (1991) J. Appl. Phys. , vol.70 , pp. 1684-1691
    • Zweig, A.1
  • 10
    • 0005368282 scopus 로고
    • Copper-laser oscillator with adjoint-coupled self-filtering injection
    • J. Chang, "Copper-laser oscillator with adjoint-coupled self-filtering injection," Opt. Lett. 20, 575-577 (1995).
    • (1995) Opt. Lett. , vol.20 , pp. 575-577
    • Chang, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.