Femtosecond laser machining of multi-depth microchannel networks onto silicon

Journal of Micromechanics and Microengineering

Volumn 21, Issue 4, 2011, Pages

  Kam, D H ^a   Shah, L ^b,c   Mazumder, J ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b IMRA AMERICA INC   (United States)

^c UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARTIFICIAL LUNG; BRANCHING NETWORK; DIRECT WRITING; FEMTOSECOND LASER MACHINING; FEMTOSECOND PULSE; GAS EXCHANGERS; KEY PARAMETERS; MICRO-FLUIDIC DEVICES; MICROCHANNEL NETWORK; PROCESSING SPEED; PROCESSING TIME; SURFACE QUALITIES;

ARTIFICIAL ORGANS; ELECTROMAGNETIC PULSE; MACHINING; RAPID PROTOTYPING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SILICONES; ULTRAFAST LASERS; ULTRASHORT PULSES;

MICROCHANNELS;

EID: 79953649536     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/4/045027     Document Type: Article

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