Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process

Applied Surface Science

Volumn 258, Issue 17, 2012, Pages 6576-6582

  Wang, Pengfei ^a   Takeno, Takanori ^a   Adachi, Koshi ^a   Miki, Hiroyuki ^a   Takagi, Toshiyuki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Carbon nitride; Friction; PECVD; PVD; Tribo film

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CARBON NITRIDE; CHEMICAL BONDS; COATINGS; DEPOSITION RATES; FILM PREPARATION; FRICTION; MAGNETRONS; NITRIDES; PHYSICAL VAPOR DEPOSITION; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRUCTURAL PROPERTIES; TRIBOLOGY;

AMORPHOUS CARBON NITRIDE COATINGS; BONDING STRUCTURE; DC MAGNETRON CO-SPUTTERING; FRICTION COEFFICIENTS; HYBRID COATING PROCESS; RADIO FREQUENCY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITIONS; SI (100) SUBSTRATE; TRIBOLOGICAL CHARACTERIZATION;

AMORPHOUS CARBON;

EID: 84860237295     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.03.082     Document Type: Article

References (43)

1. J.C. Sánchez-López, and A. Fernández C. Donnet, A. Erdemir, Tribology of Diamond-like Carbon Films 2008 Springer New York 311
2. K. Adachi, and K. Kato C. Donnet, A. Erdemir, Tribology of Diamond-like Carbon Films 2008 Springer New York 339
3. J. Wei, P. Hing, and Z.Q. Mo Wear 225-229 1999 1141
4. A.A. Voevodin, J.G. Jones, T.C. Back, J.S. Zabinski, V.E. Strel'nitzki, and I.I. Aksenov Surf. Coat. Technol. 197 2005 116
5. J. Koskinen, J.P. Hirvonen, J. Levoska, and P. Torri Diam. Relat. Mater. 5 1999 669
6. Y. Kusano, Z.H. Barber, J.E. Evetts, and I.M. Hutchings Surf. Coat. Technol. 124 2000 104
7. J.C. Sánchez-López, M. Belin, C. Donnet, C. Quiros, and E. Elizalde Surf. Coat. Technol. 160 2002 138
8. K. Kato, N. Umehara, and K. Adachi Wear 254 2003 1062
9. P. Wang, and K. Adachi Tribol. Online 6 2011 265
10. H. Miki, T. Takeno, and T. Takagi Thin Solid Films 516 2008 5414
11. T. Takeno, H. Miki, T. Sugawara, Y. Hoshi, and T. Takagi Diamond Relat. Mater. 17 2008 713
12. H. Miki, K. Ito, T. Sugawara, J. Fontaine, T. Takeno, M. Ruet, M. Belin, K. Adachi, and T. Takagi Tribol. Online 4 2009 60
13. T. Takeno, S. Abe, K. Adachi, H. Miki, and T. Takagi Diamond Relat. Mater. 19 2010 548
14. G.G. Stoney Proc. R. Soc. Lond. A 82 1909 172
15. B. Goranchev, K. Schmidt, and K. Reichelt Thin Solid Films 149 1987 L77
16. J.J. Wortman, and R.A. Evans J. Appl. Phys. 36 1965 153
17. K. Kato, and K. Adachi A. Erdemir, J.M. Martin, Superlubricity 2007 Elsevier Amsterdam 341
18. W.T. Zheng, H. Sjöström, I. Ivanov, K.Z. Xing, E. Broitman, W.R. Salaneck, J.E. Greene, and J.E. Sundgren J. Vac. Sci. Technol. A 14 1996 2696
19. Y. Kusano, J.E. Evetts, R.E. Somekh, and I.M. Hutchings Thin Solid Films 332 1998 56
20. K.M. Roh, B.K. Na, S.K. Choi, J.H. Kim, D.J. Seong, and J.W. Kim Jpn. J. Appl. Phys. 47 2008 8530
21. X. Yan, T. Xu, G. Chen, S. Yang, H. Liu, and Q. Xue J. Phys. D: Appl. Phys. 37 2004 907
22. E. Ech-chamikh, A. Essafti, Y. Ijdiyaou, and M. Azizan Solar Energy Mater. Solar Cells 90 2006 1420
23. T.W. Scharf, R.D. Ott, D. Yang, and J.A. Barnard J. Appl. Phys. 85 1999 3142
24. J. Takadoum, J.Y. Rauch, J.M. Cattenot, and N. Martin Surf. Coat. Technol. 174-175 2003 427
25. Z. Wang, C. Wang, Q. Wang, and J. Zhang J. Appl. Phys. 104 2008 073306
26. F. Zhou, K. Adachi, and K. Kato Thin Solid Films 514 2006 231
27. T. Tokoroyama, M. Kamiya, N. Umehara, C. Wang, and D. Diao Lubr. Sci. 24 2012 129
28. S. Bhattacharyya, J. Hong, and G. Turban J. Appl. Phys. 83 1998 3917
29. A.G. Fitzgerald, L. Jiang, M.J. Rose, and T.J. Dines Appl. Surf. Sci. 175-176 2001 525
30. H. Jung, and H. Park Appl. Surf. Sci. 216 2003 149
31. Y.S. Zou, Q.M. Wang, H. Du, G.H. Song, J.Q. Xiao, J. Gong, C. Sun, and L.S. Wen Appl. Surf. Sci. 241 2005 295
32. N. Nakayama, Y. Tsuchiya, S. Tamada, K. Kosuge, S. Nagata, K. Takahiro, and S. Yamaguchi Jpn. J. Appl. Phys. 32 1993 L1465
33. Y.H. Cheng, X.H. Sun, B.K. Tay, S.P. Lau, X.L. Qiao, J.G. Chen, Y.P. Wu, C.S. Xie, Y.Q. Wang, D.S. Xu, S.B. Mo, and Y.B. Sun Appl. Surf. Sci. 182 2001 32
34. J. Wei, P. Hing, and Z.Q. Mo Surf. Interface Anal. 28 1999 208
35. D.F. Franceschini, C.A. Achete, and F.L. Freire Jr. Appl. Phys. Lett. 60 1992 3229
36. L. Han, X. Chen, L. Yang, Y. Wang, X. Wang, and Y. Zhao Appl. Surf. Sci. 257 2011 6945
37. J. Hao, T. Xu, J. Zhang, and W. Liu J. Phys. D: Appl. Phys. 39 2006 1149
38. Y. Qi, E. Konca, and A.T. Alpas Surf. Sci. 600 2006 2955
39. H. Li, T. Xu, C. Wang, J. Chen, H. Zhou, and H. Liu Tribol. Int. 40 2007 132
40. A.A. Gharama, M.J. Lukitsch, Y. Qi, and A.T. Alpas Wear 271 2011 2157
41. O.L. Eryilmaz, and A. Erdemir Surf. Coat. Technol. 201 2007 7401
42. T. Watanabe, K. Yamamoto, Y. Koga, and A. Tanaka Sci. Technol. Adv. Mater. 2 2001 539
43. Y. Liu, A. Erdemir, and E.I. Meletis Surf. Coat. Technol. 82 1996 48