Tribological properties of multilayer DLC/W-DLC films on Si

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5414-5418

  Miki, Hiroyuki ^a   Takeno, Takanori ^a   Takagi, Toshiyuki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Ball on disk; Metal containing diamond like carbon (Me DLC); Multilayer; Tribological properties

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; MAGNETRON SPUTTERING; MULTILAYER FILMS; SILICON WAFERS; SURFACE MORPHOLOGY; TRIBOLOGY;

BALL ON DISK; LOW FRICTION; METAL CONTAINING DIAMOND LIKE CARBON (ME-DLC); ROTATING SPEED MEASUREMENTS;

DIAMOND LIKE CARBON FILMS;

EID: 43949126162     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.113     Document Type: Article

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