Synthesis of non-rigid core-shell structured PS/SiO 2 composite abrasives and their oxide CMP performance

Microelectronic Engineering

Volumn 96, Issue , 2012, Pages 51-55

  Mu, Weibin ^a   Fu, Meng ^a  

^a CHANGZHOU UNIVERSITY   (China)

Author keywords

Chemical mechanical polishing (CMP); Core shell structure; PS SiO 2 composite abrasives

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPE (AFM); AZOBISISOBUTYRONITRILE; COMPOSITE ABRASIVES; CORE SHELL STRUCTURE; CORE-SHELL; DIELECTRIC LAYER; FOURIER TRANSFORM INFRARED SPECTRA; MATERIAL REMOVAL RATE; NON-RIGID; OXIDE-CMP; POLISHING SLURRIES; POSITIVELY CHARGED; ROOT MEAN SQUARE VALUES; SOAP-FREE EMULSION POLYMERIZATION; TETRAETHYL ORTHOSILICATES; TOPOGRAPHICAL VARIATIONS; TRANSMISSION ELECTRON MICROSCOPE;

ABRASIVES; ATOMIC FORCE MICROSCOPY; EMULSION POLYMERIZATION; MICROSPHERES; NANOCOMPOSITE FILMS; SCANNING ELECTRON MICROSCOPY; SILICA; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CHEMICAL MECHANICAL POLISHING;

EID: 84859899825     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.02.047     Document Type: Article

References (32)

1. J. Lee, C.K. Hong, S. Choe, and S.E. Shim Journal of Colloid and Interface Science 310 1 2007 112 120
2. F. Caruso, M. Spasova, A. Susha, M. Giersig, and R.A. Caruso Chemistry of Materials 13 11 2001 109 116
3. T.K. Mandal, M.S. Fleming, and D.R. Walt Chemistry of Materials 12 11 2000 3481 3487
4. J. Zhu, A.B. Morgan, F.J. Lamelas, and C.A. Wilkie Chemistry of Materials 13 10 2001 3774 3780
5. J. Zhou, S.W. Zhang, X.G. Qiao, X.Q. Li, and L.M. Wu Journal of Polymer Science Part A-Polymer Chemistry 44 3 2006 3202 3209
6. Q.I. Li, J.P. Chapel, J.C. Castaing, J. Fresnais, and J.F. Berret Langmuir 23 11 2007 996 998
7. Y.Q. Hu, H.P. Wu, K.E. Gonsalves, and L. Merhari Microelectronic Engineering 56 13 2001 289 294
8. F.F. Fang, J.H. Kim, and H.J. Choi Polymer 50 10 2009 2290 2293
9. Y.F. Li, Z.Q. Sun, J.H. Zhang, K. Zhang, and Y.F. Wang Journal of Colloid and Interface Science 325 2 2009 567 572
10. Y.H. Zhu, X.L. Yang, and P.Y. Li Progress in Chemistry 15 6 2003 512 515
11. H. Liang, A. Ueno, and K. Shin Chemical Engineering Research and Design 78 14 2000 49 54
12. X. Feng, D.C. Sayle, Z.L. Wang, and M.S. Paras Science 312 6 2006 1504 1508
13. L. Zhang, H.B. Wang, Z.F. Zhang, F. Qin, W.L. Liu, and Z.T. Song Applied Surface Science 258 9 2011 1217 1224
14. Z.F. Zhang, and H. Lei Microelectronic Engineering 85 11 2008 714 720
15. H. Lei, H.S. Lu, and X.C. Lu Thin Solid Films 516 9 2008 3005 3011
16. A. Cecil, R. Subrahmanya, and K. Ashok Applied Surface Science 255 4 2008 3090 3096
17. Y. Chen, L.X. Xia, and Z.G. Chen Microelectronic Engineering 88 2 2011 200 205
18. Y. Chen, and R.L. Wei Applied Surface Science 257 20 2011 8679 8685
19. S. Armini, C.M. Whelan, M. Moinpour, and K. Maex Electrochemical and Solid- State Letters 10 9 2007 243 247
20. S. Armini, C.M. Whelan, M. Moinpour, J.L. Hernandez, and M. Moinpourc Journal of the Electrochemical Society 154 8 2007 667 671
21. S. Armini, C.M. Whelan, M. Moinpour, and K. Maex Journal of the Electrochemical Society 155 6 2008 401 406
22. S. Armini, C.M. Whelan, M. Moinpour, and K. Maex Journal of the Electrochemical Society 156 1 2009 18 26
23. I.A. Kartsonakis, P. Liatsi, I. Daniilidis, and G. Kordas Journal of American Ceramic Society 91 2 2008 372 378
24. W. Zhang, A.A. Dehghani-Sanij, and R.S. Blackburn Progress in Natural Science 18 7 2008 801 805
25. W. Zhao, Q. Zhang, T. Chen, and T. Lu Materials Chemistry and Physics 113 1 2009 428 434
26. Z.W. Deng, M. Chen, S.X. Zhou, B. You, and L.M. Wu Langmuir 22 14 2006 6403 6407
27. M. Chen, L. Wu, S. Zhou, and B. You Advanced Materials 18 6 2006 801 806
28. M. Darbandi, R. Thomann, and T. Nann Chemistry of Materials 19 7 2007 1700 1703
29. A. Imhof Langmuir 17 12 2001 3579 3585
30. X. Guo, Y. Deng, B. Tu, and D. Zhao Langmuir 26 2 2010 702 708
31. S.B. Chinmay, and G.L. Wilkes Chemistry of Materials 7 3 1995 535 545
32. S. Armini, I.U. Vakarelski, C.M. Whelan, K. Maex, and K. Higashitani Langmuir 23 4 2007 2007 2014