Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Applied Surface Science

Volumn 258, Issue 3, 2011, Pages 1217-1224

  Zhang, Lei ^a,b,c   Wang, Haibo ^a,b,c   Zhang, Zefang ^a,b,c   Qin, Fei ^a,b   Liu, Weili ^a,b   Song, Zhitang ^a,b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b Shanghai Xinanna Electronic Technology Co Ltd   (China)

^c UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Chemical mechanical polishing; Copper; Core shell; Nano composite abrasive

Indexed keywords

ABRASIVES; CATIONIC POLYMERIZATION; COPPER; ENERGY DISPERSIVE X RAY ANALYSIS; NANOCOMPOSITES; POLISHING; POLYSTYRENES; SCANNING ELECTRON MICROSCOPY; SHELLS (STRUCTURES); SILICA; STYRENE; TRANSMISSION ELECTRON MICROSCOPY;

AMMONIA-CATALYZED HYDROLYSIS; CATIONIC INITIATORS; CORE SHELL; CORE SHELL STRUCTURE; CORE-SHELL COMPOSITES; MATERIAL REMOVAL RATE; MONODISPERSE POLYSTYRENE; ROOT MEAN SQUARE ROUGHNESS;

CHEMICAL MECHANICAL POLISHING;

EID: 80455176986     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.09.074     Document Type: Article

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